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首页> 外文期刊>Thin Solid Films >Seed-free deposition of large-area adhesive diamond films on copper surfaces processed and patterned by femtosecond lasers
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Seed-free deposition of large-area adhesive diamond films on copper surfaces processed and patterned by femtosecond lasers

机译：飞秒激光在铜表面上无种子沉积大面积金刚石薄膜的过程

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摘要

We demonstrate that femtosecond (fs) laser patterning of Cu can be exploited to realize seed-free deposition of large-area adhesive diamond films on Cu. Fs-laser-induced nanostructures promote diamond nucleation density and result in diamond film formation within a laser fluence window from 2.6 to 3.6 J cm(-2). Diamond films deposited on Cu surfaces prepared outside this window experience either complete film detachment or formation of low-quality ball-like diamond grains. Diamond/substrate interface roughness plays a critical role in controlling diamond quality and adhesion between substrates and diamond films. Large-area adhesive diamond films have been achieved on Cu substrate surfaces that were first modified with fs-laser irradiation and then scribed into grid patterns. The scribed channels function as expansion joints for stress relief. Strain-free diamond films have been achieved by optimizing the grid size. Using fs-laser processing for seed-free deposition of large-area diamond films on Cu is of great significance for diverse applications, such as thermal management and power electronic devices. (C) 2017 Elsevier B.V. All rights reserved.
机译：我们证明了飞秒（fs）的Cu激光图案化可以用来在Cu上实现大面积金刚石薄膜的无籽沉积。 Fs激光诱导的纳米结构促进金刚石成核密度，并导致从2.6到3.6 J cm（-2）的激光通量窗内形成金刚石膜。在此窗外准备的铜表面上沉积的金刚石膜会完全脱离膜或形成低质量的球形金刚石晶粒。金刚石/基材界面的粗糙度在控制金刚石质量以及基材与金刚石膜之间的附着力方面起着至关重要的作用。在铜基板表面上已经获得了大面积的金刚石胶膜，该膜首先通过fs激光辐照进行了修饰，然后划刻为网格图案。划刻的通道用作缓解应力的伸缩缝。通过优化栅格尺寸，可以实现无应变的金刚石薄膜。使用fs激光处理在Cu上进行大面积金刚石薄膜的无籽沉积对于多种应用（例如热管理和电力电子设备）具有重要意义。 （C）2017 Elsevier B.V.保留所有权利。

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