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Thermal vapor sulfurization of molybdenum layers

机译:钼层的热蒸汽硫化

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Sulfurization of molybdenum layers is a promising route for obtaining large-scale and high-quality transition metal dichalcogenides. Here we describe the synthesis of continuous and homogeneous MoS2 in the centimeter scale by the thermal vapor sulfurization of pre-deposited molybdenum precursors on SiO2. Metallic molybdenum as well as MoO3 were used as precursors while the sulfurization was performed by chemical vapor deposition. A multi-technique characterization was employed to fully describe the deposition of molybdenum as well as its sulfurization. Thus, Raman spectroscopy, X-ray and ultra-violet photoelectron spectroscopies as well as scanning electron and atomic force microscopies indicated that the molybdenum layers were completely transformed in MoS2. The samples were homogeneous in the centimeter scale and quite flat with a root mean square roughness of 1.4 angstrom. Furthermore, its work function was 4.1 eV.
机译:钼层的硫化是获得大规模和高质量过渡金属二卤化物的有前途的途径。在这里,我们描述了通过在SiO2上预先沉积的钼前驱体进行热蒸汽硫化,在厘米级上连续且均匀地合成MoS2的方法。金属钼和MoO3用作前体,而硫化是通过化学气相沉积进行的。采用多种技术表征来充分描述钼的沉积及其硫化。因此,拉曼光谱,X射线和紫外光电子能谱以及扫描电子和原子力显微镜表明,钼层在MoS2中已完全转变。样品在厘米尺度上是均质的,并且相当平坦,均方根粗糙度为1.4埃。此外,其功函数为4.1 eV。

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