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Structure, mechanical characteristics and thermal stability of high speed physical vapor deposition (Al,Cr)_2O_3 coatings

机译：高速物理气相沉积（Al，Cr）_2O_3涂层的结构，力学特性和热稳定性

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摘要

In recent years (Al,Cr)(2)O-3 coatings manufactured by physical vapor deposition (PVD) gained great interest as alternative to alpha-Al2O3 coatings deposited by chemical vapor deposition (CVD), due to their potential to form corundum-type structure at lower process temperatures, T <= 700 degrees C. In this context, also metastable tetragonal (Al,Cr)(2)O-3 solid solution and semi-crystalline alpha-(Al,Cr)(2)O-3 coatings were developed by high speed (HS)-PVD technology. The chemical analysis of the coatings in this paper confirmed, that the deposition of semi-crystalline alpha-(Al,Cr)(2)O-3 coatings with high aluminum content, x(Al) >= 70 At.%, is possible at moderate substrate temperature, T-sub = 570 degrees C. With regard to the application on cutting and molding tools, the thermal stability of the developed coatings is of great interest. Therefore, the thermal stability of the deposited tetragonal and alpha-(Al,Cr)(2)O-3 phases was investigated by annealing tests in vacuum up to T = 1300 degrees C. X-ray diffraction (XRD) measurements after the annealing tests in vacuum revealed a phase stability of semi-crystalline alpha-(Al,Cr)(2)O-3 and metastable tetragonal (Al,Cr)(2)O-3 coating up to T = 600 degrees C and T = 800 degrees C, respectively. Diffusion processes during annealing at high temperatures in vacuum lead to significant structural changes, showing detrimental effects on the mechanical properties of the coatings. Due to thermal induced structural, chemical and mechanical changes, the evaluations confirmed a thermal stability of the (Al,Cr)(2)O-3 coatings up to a temperature of T = 800 degrees C in vacuum.
机译：近年来，通过物理气相沉积（PVD）制造的（Al，Cr）（2）O-3涂层作为通过化学气相沉积（CVD）沉积的α-Al2O3涂层的替代品引起了极大的兴趣，因为它们具有形成刚玉的潜力。在较低的过程温度（T <= 700摄氏度）下具有双晶型结构。在这种情况下，亚稳四方（Al，Cr）（2）O-3固溶体和半结晶α-（Al，Cr）（2）O-通过高速（HS）-PVD技术开发了3种涂层。本文对涂层的化学分析证实，可以沉积x（Al）> = 70 At。％的高铝含量的半结晶α-（Al，Cr）（2）O-3涂层在中等基材温度下，T-sub = 570摄氏度。关于在切割和成型工具上的应用，已开发的涂层的热稳定性引起了人们的极大兴趣。因此，通过在高达T = 1300℃的真空中进行退火测试，研究了沉积的四方相和α-（Al，Cr）（2）O-3相的热稳定性。退火后进行X射线衍射（XRD）测量真空测试显示，半结晶α-（Al，Cr）（2）O-3和亚稳四方（Al，Cr）（2）O-3的相稳定性在T = 600摄氏度和T = 800摄氏度。在真空中高温退火过程中的扩散过程导致明显的结构变化，显示出对涂层机械性能的有害影响。由于热引起的结构，化学和机械变化，这些评估证实了（Al，Cr）（2）O-3涂层在真空中的温度高达T = 800摄氏度时的热稳定性。

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