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Plasma oxidation of electron beam evaporated cadmium thin films

机译:电子束蒸发镉薄膜的等离子体氧化

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摘要

Thin films of pure cadmium have been deposited using electron beam evaporation technique. Effect of radio frequency (RF) plasma oxidation on structural, optical and electrical properties of cadmium thin films has been investigated. It was found that the RF plasma treatment affects on the physical properties of the oxidized cadmium films. Transmittance values of 87% in the visible region and 90% in the near infrared region have been obtained for cadmium oxide (CdO) film oxidized at a plasma-processing power of 600 W. The optical energy gap, E_g, was found to increase as the RF plasma-processing power increases. The resistivity values of 3× 10~(-3) and 5×10~(-3) (Ω cm) have been obtained for CdO films oxidized at RF plasma-processing powers of 550 and 600 W respectively.
机译:使用电子束蒸发技术已经沉积了纯镉薄膜。研究了射频(RF)等离子体氧化对镉薄膜的结构,光学和电学性质的影响。发现RF等离子体处理影响氧化的镉膜的物理性质。对于以600 W的等离子体处理功率氧化的氧化镉(CdO)膜,在可见光区域的透射率值为87%,在近红外区域的透射率值为90%。发现光能隙E_g随着RF等离子体处理能力增加。对于分别在550和600 W的RF等离子体处理功率下氧化的CdO膜,已获得3×10〜(-3)和5×10〜(-3)(Ωcm)的电阻率值。

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  • 来源
    《Thin Solid Films》 |2012年第13期|p.4418-4421|共4页
  • 作者

    H.M.Ali; M.Raaif;

  • 作者单位

    Physics Department, Faculty of Science, Sohag University, 82524 Sohag, Egypt Physics Department, Faculty of Science, Al-Baha University, P. Office 1034, P. Code 6543t Saudi Arabia;

    Physics Department, Faculty of Science, Sohag University, 82524 Sohag, Egypt;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    thin films; cadmium; plasma oxidation; optical properties; electrical properties;

    机译:薄膜;镉;等离子体氧化;光学性质电性能;

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