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Effect of nitrogen-hydrogen mixed plasma on nitridation process of iron nanoparticles

机译:氮氢混合等离子体对铁纳米颗粒氮化过程的影响

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摘要

Fe_3O_4 nanoparticles coated with an oleic acid as a surfactant were reduced and nitrided by hydrogen plasma and nitrogen-hydrogen mixed plasma generated by 13.56 MHz Radio-Frequency. Fe_3O_4 nanoparticles could be reduced to a-Fe nanoparticles with small average grain size about 35 nm and with little carbonization by hydrogen plasma treatment. In the nitrogen-hydrogen mixed plasma treatment, it was clarified that the mixture of hydrogen with ratio of 10-30% to nitrogen accelerated nitridation of a-Fe nanoparticles. This effect was derived by generating exited species with higher activity such as NH ions and its radicals. Furthermore, it was also revealed that nitridation behavior strongly depended on average grain size of as-prepared a-Fe nanoparticles. In the plasma nitridation of a-Fe nanoparticles with average grain size of 35 nm, the nitridation was easily promoted with lower input power. This could be attributed to large surface energy of nanoparticles because nanoparticles had wide surface area than bulk materials.
机译:涂有油酸作为表面活性剂的Fe_3O_4纳米颗粒被13.56 MHz射频产生的氢等离子体和氮氢混合等离子体还原和氮化。 Fe_3O_4纳米颗粒可通过氢等离子体处理还原为平均粒径约为35 nm且碳化很少的α-Fe纳米颗粒。在氮-氢混合等离子体处理中,已阐明氢与氮的比例为10-30%的混合物加速了α-Fe纳米颗粒的氮化。通过产生具有较高活性的退出物种(例如NH离子及其自由基)来获得这种效果。此外,还揭示出氮化行为强烈取决于所制备的α-Fe纳米颗粒的平均晶粒尺寸。在平均粒径为35 nm的a-Fe纳米粒子的等离子体氮化中,以较低的输入功率容易促进氮化。这可以归因于纳米颗粒的大表面能,因为纳米颗粒比本体材料具有更大的表面积。

著录项

  • 来源
    《Thin Solid Films》 |2011年第23期|p.8351-8354|共4页
  • 作者单位

    Hitachi Metals, 1-2-1, Shibaura, Minato-ku, 105-8614 Tokyo, Japan;

    Graduate School of Engineering, Department of Electronic Engineering, Tohoku University, 6-6-05, Aoba, Aramatd, Aoba-ku, Sendai, 980-8579 Miyagi, Japan;

    Graduate School of Engineering, Department of Electronic Engineering, Tohoku University, 6-6-05, Aoba, Aramatd, Aoba-ku, Sendai, 980-8579 Miyagi, Japan;

    Graduate School of Engineering, Department of Electronic Engineering, Tohoku University, 6-6-05, Aoba, Aramatd, Aoba-ku, Sendai, 980-8579 Miyagi, Japan;

    Graduate School of Engineering, Department of Electronic Engineering, Tohoku University, 6-6-05, Aoba, Aramatd, Aoba-ku, Sendai, 980-8579 Miyagi, Japan;

    Graduate School of Engineering, Department of Electronic Engineering, Tohoku University, 6-6-05, Aoba, Aramatd, Aoba-ku, Sendai, 980-8579 Miyagi, Japan;

    Graduate School of Engineering, Department of Electronic Engineering, Tohoku University, 6-6-05, Aoba, Aramatd, Aoba-ku, Sendai, 980-8579 Miyagi, Japan;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    α-Fe; carbonization; nanoparticles; nitridation; plasma; reduction;

    机译:α-Fe;碳化纳米粒子氮化等离子体;减少;

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