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首页> 外文期刊>Thin Solid Films >Thin plasma-polymerized layers of hexamethyldisiloxane for humidity sensor development
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Thin plasma-polymerized layers of hexamethyldisiloxane for humidity sensor development

机译：用于湿度传感器开发的六甲基二硅氧烷等离子体聚合薄层

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摘要

The response of resistive-type sensors based on thin hexamethyldisiloxane layers to relative humidity (RH) was evaluated. Humidity sensitive layers were plasma polymerized at low frequency glow discharge using a capacitively coupled parallel plate reactor. The sensor design comprises the absorbing layer deposited on clean glass substrate with comb-shape aluminum electrodes (interdigitated structure). The change in electrical impedance of the sensing film was monitored as the device was exposed to humidity. The variation of the plasma-polymerization parameters resulted in different humidity sensing properties which could be correlated to the results of Fourier transform infrared spectroscopy (FTIR). The deposited films exhibited a detectable response to RH ranging from 30 to 95% with low hysteresis, good reproducibility and stability in long-term use. Films with a greater thickness showed a significant decrease in the humidity sensing capability. FTIR analysis revealed the presence of SiH bonding groups, which are frequently linked to the film density. The increase in the plasma discharge power induced also a significant decrease in the diffusion process of water vapor inside the sensitive layer bulk.
机译：评估了基于六甲基二硅氧烷薄层的电阻型传感器对相对湿度（RH）的响应。使用电容耦合平行板反应器在低频辉光放电下将湿度敏感层进行等离子体聚合。传感器设计包括吸收层，该吸收层沉积在带有梳状铝电极（叉状结构）的干净玻​​璃基板上。当设备暴露在湿气中时，监测传感膜的电阻抗变化。等离子体聚合参数的变化导致不同的湿度感测特性，这可能与傅立叶变换红外光谱（FTIR）的结果有关。沉积的薄膜对RH的可检测响应范围为30％至95％，具有低滞后性，良好的可重复性和长期使用的稳定性。厚度更大的薄膜显示出湿度感测能力显着下降。 FTIR分析表明存在SiH键合基团，该基团通常与薄膜密度有关。等离子体放电功率的增加还导致显着降低了敏感层内部的水蒸气的扩散过程。

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  • 来源
    《Thin Solid Films》 |2009年第15期|4455-4460|共6页
  • 作者

    N. Guermat; A. Bellel; S. Sahli; Y. Segui; P. Raynaud;

  • 作者单位

    Universite Mentouri de Constantine, Laboratoire des Etudes de Materiaux d'Electronique pour Applications Medicates (LEMEAMED), Faculte des Sciences de l'Ingenieur, Constantine 25000, Algeria;

    Universite Mentouri de Constantine, Laboratoire des Etudes de Materiaux d'Electronique pour Applications Medicates (LEMEAMED), Faculte des Sciences de l'Ingenieur, Constantine 25000, Algeria;

    Universite Mentouri de Constantine, Laboratoire de Microsystemes et Instrumentation (LMI), Faculte des Science de l'Ingenieur, Constantine 25000, Algeria;

    Universites de Toulouse, Laboratoire Plasma et Conversion d'Energie (LAPLACE), CNRS, INPT, Universite Paul Sabatier, 118 Route de Narbonne, 31062 Toulouse Cedex, France;

    Universites de Toulouse, Laboratoire Plasma et Conversion d'Energie (LAPLACE), CNRS, INPT, Universite Paul Sabatier, 118 Route de Narbonne, 31062 Toulouse Cedex, France;

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  • 原文格式 PDF
  • 正文语种 eng
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  • 关键词

    organosilicon; thin films; plasma deposition; humidity; sensor; fourier transform infrared spectroscopy;

    机译：有机硅薄膜;等离子体沉积湿度;传感器;傅立叶变换红外光谱;

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