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Durability of doped zinc oxide/silver/doped zinc oxide low emissivity coatings in humid environment

机译:掺杂的氧化锌/银/掺杂的氧化锌低辐射率涂层在潮湿环境中的耐久性

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摘要

The relationship between internal stress of doped zinc oxide films and durability of doped zinc oxide/silver/doped zinc oxide low emissivity (low-e) coatings in humid environment was investigated. Aluminum, titanium, tin, chromium, silicon, gallium, magnesium, boron, barium, and calcium were chosen as a doping element in sputtering targets. Ratios of dopant/zinc in the oxide targets were 4/96-5/95 at.%. Films were formed by radio frequency sputtering. Doping of barium and calcium to the zinc oxide film led to a large increase in the internal stress. Doping of the other elements resulted in decreasing the internal stress. It was concluded that durability of the low-e coatings in humid environment closely correlated with the internal stress of the oxide layers.
机译:研究了湿润环境中掺杂氧化锌薄膜的内应力与掺杂氧化锌/银/掺杂氧化锌低辐射率(low-e)涂层的耐久性之间的关系。选择铝,钛,锡,铬,硅,镓,镁,硼,钡和钙作为溅射靶材中的掺杂元素。氧化物靶中的掺杂剂/锌的比率为4 / 96-5 / 95原子%。通过射频溅射形成膜。钡和钙掺杂到氧化锌膜上导致内部应力的大幅增加。掺杂其他元素导致内部应力降低。结论是,低辐射涂层在潮湿环境中的耐久性与氧化层的内应力密切相关。

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