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Advances in the application of modulation spectroscopy to vertical cavity structures

机译：调制光谱在垂直腔结构中的应用进展

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Modulated reflectance is a straightforward technique in which the reflectivity spectrum of a semiconductor is perturbed by an external periodic influence-most usefully a chopped laser beam, i.e. photo-modulated reflectance (PR). Since samples need no special mounting, can be studied in air at room-temperature and can be full-sized pre-fabrication wafers, PR is truly nondestructive. In contrast to conventional photo-luminescence, PR spectra are often replete with sharp, detailed derivative-like features arising from ground-state, and other possible higher-energy optical transitions within a sample, from which can be extracted material parameters crucial to successful and efficient device operation, such as compositions, layer thicknesses, built-in electric fields and band line-ups. The paper discusses the advances made by our group in the application and interpretation of modulation spectroscopy of vertical-cavity surface-emitting lasers and resonant-cavity light-emitting diodes, which so far have defied analysis by the more conventional non-destructive techniques.
机译：调制反射率是一种简单的技术，其中半导体的反射率谱受到外部周期性影响的干扰，最有用的是斩波激光束，即光调制反射率（PR）。由于样品不需要特殊的安装，可以在室温下的空气中进行研究，并且可以制成全尺寸的预制晶圆，因此PR确实是无损的。与传统的光致发光相比，PR光谱通常充满了基态以及样品中其他可能的高能光学跃迁引起的尖锐，详细的类似衍生物的特征，可以从中提取对成功和关键的材料参数。高效的器件操作，例如成分，层厚度，内置电场和能带排列。本文讨论了我们小组在垂直腔表面发射激光器和谐振腔发光二极管的调制光谱的应用和解释方面取得的进展，迄今为止，这些研究已被较传统的无损技术所拒绝。

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