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首页> 外文期刊>Thin Solid Films >Structural, mechanical and tribological investigations of pulsed laser deposited titanium nitride coatings
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Structural, mechanical and tribological investigations of pulsed laser deposited titanium nitride coatings

机译：脉冲激光沉积氮化钛涂层的结构，机械和摩擦学研究

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The high hardness and the low-wear rates characterize the outstanding tribological behaviour of titanium nitride (TiN) making it to the most widespread material for hard coatings, which were deposited industrially in recent years by employing various deposition methods. For coating of heat sensitive materials and machine parts at low temperatures down to room temperature, only a few deposition techniques can be applied. One of these is the pulsed laser deposition (PLD) method. In this work a multi-spot PLD system with four Nd:YAG laser beams (1064-nm wavelength) was applied to vaporize titanium targets in low-pressure N_2 atmospheres at room temperature. For the deposition of the TiN coatings, high speed tool steel (AISI M2) and corrosion resistant steel (AISI 630 HT) substrates were used. To investigate the differences of film growth in dependency of the target-substrate arrangement, the substrate surfaces were situated parallel (on-axis) and rectangular (off-axis) to the target. The coatings were examined by light-microscopy, scanning electron microscopy, X-ray diffraction, nanoindentation and pin-on-disc tests against ball-bearing steel (DIN 100Cr6/AISI 52100) and alumina (Al_2O_3) counterparts. The results indicate a high influence of the target-substrate arrangement on the textures, residual stresses and hardnesses of the TiN coatings. In spite of these differences all coatings on both on-axis and off-axis placed substrates possess excellent adhesion and high-wear resistance.
机译：高硬度和低磨损率表征了氮化钛（TiN）的出色的摩擦学性能，使其成为最广泛使用的硬质涂层材料，这些材料近年来已通过各种沉积方法在工业上进行了沉积。为了在低至室温的低温下涂覆热敏材料和机器零件，只能使用几种沉积技术。其中之一是脉冲激光沉积（PLD）方法。在这项工作中，使用具有四个Nd：YAG激光束（波长1064 nm）的多点PLD系统在室温下在低压N_2气氛中蒸发钛靶。为了沉积TiN涂层，使用了高速工具钢（AISI M2）和耐腐蚀钢（AISI 630 HT）基体。为了研究取决于靶-基板布置的膜生长的差异，将基板表面定位成与靶平行（在轴上）和矩形（离轴）。通过光学显微镜，扫描电子显微镜，X射线衍射，纳米压痕以及针对圆盘轴承钢（DIN 100Cr6 / AISI 52100）和氧化铝（Al_2O_3）的圆盘测试来检查涂层。结果表明靶-基片排列对TiN涂层的织构，残余应力和硬度有很大影响。尽管存在这些差异，但在轴上和轴外放置的基材上的所有涂层都具有出色的附着力和高耐磨性。

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