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Lead-based ferroelectric compounds deposited by PLD

机译：PLD沉积的铅基铁电化合物

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摘要

Lead based ferroelectric thin films have been grown by pulsed laser deposition (PLD) on Si, MgO and Sapphire substrates starting from sintered targets of Pb(Mg_(1/3)Nb_(2/3))O_3-PbTiO_3 (PMN-PT) and (Pb_(1-x)La_x)(Zr_(0.65)Ti_(0.33))O_3 (PLZT) with variable PT and La contents, respectively. A parametric study has been performed to investigate the influence of the laser wavelength (266, 355, 532 and 1064 nm), laser fluence (2-25 J/cm~2), oxygen pressure (0.2-0.8 mbar), substrate temperature (400-650 ℃) on the composition and crystallinity, and on dielectric, ferroelectric and piezoelectric properties. Dielectric measurements were done over a wide frequency and temperature range. The dielectric permittivity and loss were investigated for films obtained with different deposition parameters and diffuse-like features were identified in small-grain size micro structured films. The polarization-electric field dependence has been measured at different frequency and temperature conditions. Piezoelectric local probing has been performed and the dependence of longitudinal piezoelectric coefficient on microstructure and texture was obtained.
机译：从Pb（Mg_（1/3）Nb_（2/3））O_3-PbTiO_3（PMN-PT）的烧结靶开始，已通过脉冲激光沉积（PLD）在Si，MgO和蓝宝石衬底上生长了铅基铁电薄膜。和（Pb_（1-x）La_x）（Zr_（0.65）Ti_（0.33））O_3（PLZT）分别具有可变的PT和La含量。已进行参数研究以研究激光波长（266、355、532和1064 nm），激光能量密度（2-25 J / cm〜2），氧气压力（0.2-0.8 mbar），基板温度（ 400-650℃）的组成和结晶度，以及介电，铁电和压电性能。介电测量在很宽的频率和温度范围内进行。研究了具有不同沉积参数的薄膜的介电常数和损耗，并在小粒径微结构化薄膜中发现了类似扩散的特征。已经在不同的频率和温度条件下测量了极化电场依赖性。已经进行了压电局部探测，并且获得了纵向压电系数对微观结构和织构的依赖性。

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