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首页> 外文期刊>Thin Solid Films >Microstructures and film properties of La_(0.7)Ca_(0.3)CoO_3 produced by pulsed reactive crossed-beam laser ablation
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Microstructures and film properties of La_(0.7)Ca_(0.3)CoO_3 produced by pulsed reactive crossed-beam laser ablation

机译:脉冲反应性交叉束激光烧蚀产生的La_(0.7)Ca_(0.3)CoO_3的组织和薄膜性能

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摘要

The quality and microstructure of La_(0.7)Ca_(0.3)CoO_3 films produced by pulsed reactive crossed-beam laser ablation are analyzed considering composition, crystallographic orientation and morphology. The effects of cooling conditions, deposition with an oxygen background and of an additional N_2O gas pulse are studied. The analysis indicates that the best film quality is obtained for films deposited in the presence of the gas pulse and the oxygen background, followed by a fast cooling. The presence of the different oxidizing sources influences the crystallographic orientation of the grown films.
机译:考虑了成分,晶体学取向和形貌,分析了脉冲反应性交叉束激光烧蚀制备的La_(0.7)Ca_(0.3)CoO_3薄膜的质量和微观结构。研究了冷却条件,氧气背景下的沉积以及附加的N_2O气体脉冲的影响。分析表明,在存在气体脉冲和氧气本底,然后快速冷却的条件下,沉积的薄膜可获得最佳的薄膜质量。不同氧化源的存在影响生长的膜的晶体学取向。

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