Sub-picosecond excimer laser machining of a thick film circuit material

Z. Kantor

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Sub-picosecond excimer laser machining of a thick film circuit material

机译：亚皮秒准分子激光加工厚膜电路材料

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摘要

Thick film conductor layer has been ablated by focussed sub-picosecond excimer laser beam to form narrow (typically 20-μm wide) isolation gaps for conducting polymer based sensor application.

机译：厚膜导体层已被聚焦的亚皮秒准分子激光束烧蚀，形成了狭窄的（通常为20μm宽）隔离间隙，用于进行基于聚合物的传感器应用。

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来源
《Thin Solid Films》 |2004年第4期|p.350-352|共3页
作者
Z. Kantor;
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作者单位

University of Szeged -Hungarian Academy of Sciences, Research Group on Laser Physics, H-6701 Szeged P.O. Box 406, Hungary;

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原文格式 PDF
正文语种 eng
中图分类工程材料学;
关键词
sub-picosecond laser; laser processing; gas sensors; ablation;

机译：亚皮秒激光;激光加工;气体传感器;消融;

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1. Topography of Features Machined into Bisphenol A Polycarbonate Using Closed Thick Film Flowing Filtered Water Immersed KrF Excimer Laser Ablation [J] . C. F. DOWDING, J. LAWRENCE Lasers in engineering . 2010,第3a4期

机译：使用闭式厚膜流动滤水浸入KrF准分子激光烧蚀加工成双酚A聚碳酸酯的特征的形貌
2. Excimer laser ablation of thick SiOx-films: Etch rate measurements and simulation of the ablation threshold [J] . Ihlemann J., Meinertz J., Danev G. Applied Physics Letters . 2012,第9期

机译：准分子激光烧蚀厚SiOx膜：蚀刻速率测量和烧蚀阈值模拟
3. Excimer laser ablation of thick SiO_x-films: Etch rate measurements and simulation of the ablation threshold [J] . J. Ihlemann, J. Meinertz, G. Danev Applied Physics Letters . 2012,第9期

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4. Crystallisation of 500nm thick a-SiGe:H films through ArF-Excimer Laser radiation [C] . S.Chiussi, F.Fabbri, L.Fornarini, International Conference on Advanced Laser Technologies . 2003

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5. Toward High Performance Integrated Semiconductor Micro and Nano Lasers Enabled by Transparent Conducting Materials: from Thick Structure to Thin Film. [D] . Ou, Fang. 2012

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6. Synthesis and Evaluation of Thick Films of Electrochemically Deposited Bi2Te3 and Sb2Te3 Thermoelectric Materials [O] . Nguyen Huu Trung, Kei Sakamoto, Nguyen Van Toan, 2017

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7. Topography of features machined into bisphenol A polycarbonate using closed thick film flowing filtered water immersed KrF excimer laser ablation [O] . Dowding Colin F., Lawrence Jonathan 2010

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8. Excimer Laser Crystallization of Silicon Films: Artificially-Controlled Super Lateral Growth for Grain Boundary Location-Controlled and Single Crystal Island Materials for Thin Film Transistor Applications [R] . Im, J. S. , Sposili, R. S. 1998

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Sub-picosecond excimer laser machining of a thick film circuit material

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