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Spectroscopic analysis of femtosecond laser-induced gas breakdown

机译：飞秒激光引起的气体击穿的光谱分析

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摘要

The plasma generated by the interaction of a femtosecond laser pulse with gas has been analyzed using time- and space-resolved emission spectroscopy. The laser beam has been focused with a microscope objective into different gases (air, Ar, He) at pressures ranging from 10~2 to 10~5 Pa. From the analysis of spectral line emission from ions and neutral atoms, the plasma parameters and the plasma composition have been determined as a function of time and space. Furthermore, the generation of fast electrons and/or VUV radiation by the femtosecond laser interaction with the gas was brought to the fore. From the time-and space-evolution of the plasma parameters, a rough estimation of initial values of electron density and refraction index in the focal volume has been performed. These results are compared to analysis of the laser beam transmitted by the plasma. The latter show that only a small fraction of the laser energy is absorbed by the plasma while the spatial distribution of the transmitted laser beam is strongly perturbed by the plasma, which acts like a defocusing lens. However, in ambient helium, the plasma defocusing is weak due to the high ionization potential of helium. The understanding of femtosecond laser-induced gas breakdown is useful for process optimization in femtosecond laser applications like micromachining or surface microanalysis, etc.
机译：飞秒激光脉冲与气体相互作用产生的等离子体已使用时间和空间分辨发射光谱进行了分析。激光束已用显微镜物镜聚焦在10〜2至10〜5 Pa的压力范围内的不同气体（空气，Ar，He）中。通过分析离子和中性原子的光谱线发射，等离子体参数和血浆成分已确定为时间和空间的函数。此外，飞秒激光与气体的相互作用迅速产生了电子和/或VUV辐射。根据等离子体参数的时空演化，已经对电子密度的初始值和焦点体积中的折射率进行了粗略估计。将这些结果与由等离子体传输的激光束的分析进行比较。后者表明，等离子体仅吸收了很小一部分激光能量，而透射的激光束的空间分布却受到等离子体的强烈干扰，就像散焦透镜一样。但是，在环境氦气中，由于氦气的高电离势，等离子体散焦很弱。飞秒激光引起的气体击穿的理解对于飞秒激光应用（例如微加工或表面微分析等）中的工艺优化非常有用。

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