• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>TriboTest >Microtribological behaviour of thin DLC films using different testing methods
【24h】

Microtribological behaviour of thin DLC films using different testing methods

机译：使用不同测试方法的DLC薄膜的微摩擦学行为

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

To enhance the lifetime and reliability of microcomponents, thin microtribological films are applied to microparts. With reduction of the component size, investigation methods for tribological testing must be adapted. This paper studies the microtribological behaviour of thin diamond-like carbon (DLC) films using different testing methods. To tie in with macroscopic results, to determine friction we used the well-known pin-on-disc test with spherical surfaces of 10mm diameter under a typical load of 3N. For investigations of the behaviour under single asperity contact, Atomic Force Microscope (AFM) methods with applied loads of a few hundred micronewtons were used. Investigations on thin DLC films showed that the friction coefficient under single asperity contact is strongly dependent on the applied load and the resulting contact area. Especially for thin films (up to a few hundred nanometres) the friction coefficient is influenced by the substrate material. With decreasing substrate Young's modulus the friction coefficient also decreases. On the other hand, an increase in the abrasive wear resistance was observed using soft substrate materials. In this paper we show that the friction coefficient was also reduced by a simple surface structure. For investigations we used photolithography to create concentric circles in different substrates. This resulted in a behaviour like riding on rails for the pin-on-disc test. Depending on the tribological pairing the friction coefficient was reduced to more than 50% of the original value.
机译：为了提高微组件的寿命和可靠性，将微摩擦学薄膜应用于微零件。随着部件尺寸的减小，必须采用摩擦学试验的研究方法。本文使用不同的测试方法研究类金刚石薄碳（DLC）薄膜的微摩擦学行为。为了结合宏观结果，确定摩擦力，我们使用了众所周知的销钉圆盘试验，在3N的典型载荷下，球面直径为10mm。为了研究单次粗糙接触下的行为，使用了施加力为几百微牛顿的原子力显微镜（AFM）方法。对薄DLC薄膜的研究表明，单次粗糙接触下的摩擦系数在很大程度上取决于所施加的载荷和所产生的接触面积。特别是对于薄膜（高达几百纳米），摩擦系数受基材的影响。随着基底杨氏模量的减小，摩擦系数也减小。另一方面，使用软质基材可观察到耐磨性的提高。在本文中，我们表明，摩擦系数也由于简单的表面结构而降低。为了进行研究，我们使用光刻在不同的基板上创建同心圆。这导致了像在圆盘上进行销钉测试的行为。根据摩擦学配对，摩擦系数降低到原始值的50％以上。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号