We developed mass product type c-BN thin films coating equipment for cutting tool. Our coating method is magnetically enhanced plasma ion plating (MEP-IP).Distinction of our coating system have 100 kHz of substrate power supply frequency and stabilized plasma source for insulated c-BN coating. With these distinctions, c-BN thin film didn't peel from substrate and composition of c-BN thin film became stable.The c-BN film by using this equipment has practical deposition rate 1.0 μm/h, high hardness 4000 HK, low friction coefficient 0.17, and high performance of cutting property.%窒化ホウ素は，高硬度，高耐熱性を持つc-BN，高温でのrn潤滑特性に優れるh-BN等の結晶構造を持つ．c-BN結晶をrn用いた焼結体は，近年積極的に耐熱部品，高能率工具に利用rnされるようになっている．c-BN焼結体工具は，高硬度材料rnを切削加工するときに能力を発揮し，長寿命工具として認識rnさわている．
展开▼
