Rutherford backscattering spectroscopy (RBS) is one of the widely used surface analysis techniques for the measurement of composition depth profiles. It allows quantitative and non-destructive analysis with a depth resolution of ～10 nm. Using He ions of several hundred keV as a probe beam and a magnetic spectrometer for the energy analysis of scattered ions, the depth resolution can be improved to sub-nm region in RBS. This technique, called high-resolution RBS (HRBS), is an excellent technique for the analysis of ultra-thin films as well as surface and interface structures. After a brief description of the fundamentals of HRBS, some examples of the application of HRBS are presented, which includes analysis of high-k gate stack structures, the surface structure of an ionic liquid, trimethylpropylammonium bis(trifluoromethanesulfonyl)imide, and the combination analysis of HRBS and angle-resolved X-ray pho-toelectron spectroscopy.%20世紀のはじめに，ラザフォードらはアルファ粒子を金rn属薄膜に照射して，散乱されたアルファ粒子の散乱角度分布rnの測定から，原子の構造を決定した．ラザフォードの実験rnは，その後の加速器を用いた原子核・素粒子実験のさきがけrnと言える．
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