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Energy-filtered electron backscatter diffraction

机译：能量过滤电子背散射衍射

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The electron backscatter diffraction (EBSD) analytical technique is invaluable for determining the crystallography of bulk alloys, thin films, and nanoparticles. However, our physical understanding of EBSD pattern generation is incomplete, which hinders our ability to push the limits of EBSD analysis. Here, using an energy filter with better than 10 eV resolution, we experimentally demonstrate the energy dependence of EBSD patterns from elements over a large atomic number range. We verify that low-loss electrons are the major contributors to EBSD patterns, but that there is still a diffraction contribution from electrons with only 80 percent of the incident beam energy. Additionally, the bands in filtered EBSD patterns have contrast that is more than twice the contrast of their unfiltered counterparts. The band contrast reaches a maximum for a cutoff energy in the filter of about 3 percent below the energy of the incident beam. Different mechanisms are used to explain the drop in contrast on each side of the maximum. With the cutoff set very close to the energy of the incident beam, the patterns become more blurred. We used a Monte Carlo simulation in the analysis of these experiments.
机译：电子背散射衍射（EBSD）分析技术对于确定块状合金，薄膜和纳米颗粒的晶体学非常有价值。但是，我们对EBSD模式生成的物理理解还不完善，这阻碍了我们突破EBSD分析极限的能力。在这里，我们使用分辨率高于10 eV的能量滤波器，通过实验证明了大原子序数范围内元素的EBSD模式的能量依赖性。我们验证了低损耗电子是EBSD模式的主要贡献者，但是在入射束能量仅为80％的情况下，电子仍然有衍射贡献。此外，滤波后的EBSD模式中的波段对比度是未滤波对应物的对比度的两倍以上。对于滤波器中的截止能量，其波段对比度达到最高，比入射光束的能量低约3％。使用不同的机制来解释最大值两侧的对比度下降。截止设置非常接近入射光束的能量时，图案变得更加模糊。我们在这些实验的分析中使用了蒙特卡洛模拟。

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