Identification and Characterization of Monomeric, Volatile SiCl_3NH_2 as Product of the Reaction between SiCl_4 and NH_3:An Important Intermediate on the Way to Silicon Nitride?

Hans-Jorg Himmel; Nils Schiefenhovel; Michael Binnewies

首页> 外文期刊>Chemistry: A European journal >Identification and Characterization of Monomeric, Volatile SiCl_3NH_2 as Product of the Reaction between SiCl_4 and NH_3:An Important Intermediate on the Way to Silicon Nitride?

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Identification and Characterization of Monomeric, Volatile SiCl_3NH_2 as Product of the Reaction between SiCl_4 and NH_3:An Important Intermediate on the Way to Silicon Nitride?

机译：SiCl_4与NH_3之间反应的产物，单体，挥发性SiCl_3NH_2的鉴定和表征：氮化硅的重要中间体吗？

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We studied the reaction of SiCl_4 with NH_3 by mass spectrometry and IR spectroscopy. By means of mass spectrometry, SiCl_3NH_2 was for the first time identified as an intermediate generated in significant amounts in the course of the reaction. In additional experiments, SiCl_3NH_2 was formed as a stable gaseous product of the ammonolysis of SiCl_4, and the product was identified and characterized in detail by IR spectroscopic methods (gas phase and matrix isolation) in combination with quantum-chemical calculations. The calculatons also gave access to important thermodynamical data.

机译：我们通过质谱和红外光谱研究了SiCl_4与NH_3的反应。通过质谱分析法，首次将SiCl_3NH_2鉴定为在反应过程中大量生成的中间体。在另外的实验中，形成SiCl_3NH_2作为SiCl_4氨解的稳定气态产物，并通过红外光谱法（气相和基质分离）结合量子化学计算对产物进行了鉴定和表征。计算还可以访问重要的热力学数据。

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《Chemistry: A European journal》 |2003年第6期|共7页
作者
Hans-Jorg Himmel; Nils Schiefenhovel; Michael Binnewies;
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正文语种 eng
中图分类化学;应用化学;
关键词
ammonolysis; density functional calculations; IR spectro-scopy; mass spectrometry; silanes;

机译：氨解;密度泛函计算;红外光谱;质谱;硅烷;

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1. Identification and Characterization of Monomeric, Volatile SiCl_3NH_2 as Product of the Reaction between SiCl_4 and NH_3:An Important Intermediate on the Way to Silicon Nitride? [J] . Hans-Jorg Himmel, Nils Schiefenhovel, Michael Binnewies Chemistry: A European journal . 2003,第6期

机译：SiCl_4与NH_3之间反应的产物，单体，挥发性SiCl_3NH_2的鉴定和表征：氮化硅的重要中间体吗？
2. Reactions between SiCl_4 and NH_3 leading to the formation of silicon nitride powders [J] . Gerald Ziegenbalg, Thomas Focke, Horst Holldorf, Key Engineering Materials . 1997,第Pt1期

机译：SiCl_4与NH_3之间的反应导致形成氮化硅粉末
3. Strong white and blue photoluminescence from silicon nanocrystals in SiN_x grown by remote PECVD using SiCl_4/NH_3 [J] . A Benami, G Santana, A Ortiz Nanotechnology . 2007,第15期

机译：使用SiCl_4 / NH_3通过远程PECVD生长的SiN_x中的硅纳米晶体产生的强白光和蓝光
4. Reactions between SiCl_4 and NH_3 leading to the formation of silicon nitride powders [C] . G. Ziegenhaig, T. Focke Conference and exhibition of the European ceramic society . 1997

机译：SiCl_4和NH_3之间的反应导致形成氮化硅粉末
5. Development of C-C and C-N Bond Forming Reactions Utilizing Palladium Carbene Intermediates and Reaction Predictor: Using Machine Learning to Help Identify Unknown Side-Products in Organic Reactions [D] . Gutman, Eugene. 2017

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6. Fabrication and Characterization of Short Silicon Nitride Fibers from Direct Nitridation of Ferrosilicon in N2 Atmosphere [O] . Jiasuo Guan, Yaohui Wang, Laifei Cheng, 2018

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7. Identification of nitriding mechanisms in high purity reaction bonded silicon nitride [O] . J.S. Haggerty 1993

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8. Development of a Statistically Proven Injection Molding Method for Reaction Bonded Silicon Nitride, Sintering Reaction Bonded Silicon Nitride, and Sintered Silicon Nitride. Final Report, July 1, 1985-June 30, 1986 [R] . Steiner, M. 1987

机译：开发一种经过统计验证的反应键合氮化硅注射成型方法，烧结反应键合氮化硅和烧结氮化硅。最终报告，1985年7月1日至1986年6月30日

Identification and Characterization of Monomeric, Volatile SiCl_3NH_2 as Product of the Reaction between SiCl_4 and NH_3:An Important Intermediate on the Way to Silicon Nitride?

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