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Diagnostics and Kinetic Modeling of a Hollow Cathode N_2O Discharge

机译:空心阴极N_2O放电的诊断和动力学建模

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摘要

The present work describes a systematic experimental investigation of a N_2O hollow cathode discharge. The local electron mean energy and density have been determined with a double Langmuir probe. Fourier transform infrared spectroscopy and mass spectrometry have been employed for the measurement of the concentration of the stable species present in the discharge. N_2O, N_2, O_2, and NO are always identified as the main constituents of the discharge plasma. In addition, NO_2 is found for the first time in a glow discharge of nitrous oxide. As a plausible explanation, a reaction of NO with oxygen atoms adsorbed on the cathode walls is proposed, although homogeneous reactions of vibrationally excited species cannot be discarded. A model based on a reduced set of kinetic equations including electron dissociation, gas-phase reactions, and gas-surface processes can give a global account o the measured data for all the experimental conditions used. The results are discussed and, when possible, compared to previous works on other types of N_2O glow discharges.
机译:本工作描述了N_2O空心阴极放电的系统实验研究。用双朗缪尔探针测定了局部电子平均能量和密度。傅里叶变换红外光谱和质谱已用于测量放电中存在的稳定物质的浓度。 N_2O,N_2,O_2和NO始终被认为是放电等离子体的主要成分。另外,在氧化亚氮的辉光放电中首次发现NO_2。作为合理的解释,提出了NO与吸附在阴极壁上的氧原子的反应,尽管不能消除振动激发物种的均匀反应。基于简化的一组动力学方程的模型,包括电子离解,气相反应和气体表面过程,可以为使用的所有实验条件提供整体的测量数据。对结果进行了讨论,并在可能的情况下与以前对其他类型的N_2O辉光放电的工作进行了比较。

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