Sub-nanometer stable precision MEMS clamping mechanism maintaining clamp force unpowered for TEM application

Brouwer DM; de Jong BR; Soemers HMJR; Van Dijk J

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Sub-nanometer stable precision MEMS clamping mechanism maintaining clamp force unpowered for TEM application

机译：亚纳米级稳定精密MEMS夹紧机构，可保持TEM应用无动力的夹紧力

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A design is presented for a relatively large force (0.5 mN) high-precision MEMS clamping mechanism. The clamp is a part of a MEMS transmission electron microscope (TEM) sample manipulator, which needs to be fixed unpowered once positioned. The elastic deformation of the clamp suspension has been optimized in order to not influence the TEM sample manipulator position during clamping. The dimensions of the elastic elements have been further optimized for minimal elastic energy storage, minimizing the force needed for deformation and thus reducing the device area. Fabrication involves a back-etch release process, offering great design freedom, resulting in a compact design.

机译：提出了一种针对较大力（0.5 mN）的高精度MEMS夹紧机构的设计。该夹具是MEMS透射电子显微镜（TEM）样品操纵器的一部分，一旦定位，就需要在没有电源的情况下进行固定。夹具悬架的弹性变形已得到优化，以在夹持过程中不影响TEM样品操纵器的位置。弹性元件的尺寸已进一步优化，以最大程度地减少弹性能量存储，最大程度地减少变形所需的力，从而减小设备面积。制造涉及回蚀刻释放过程，提供了极大的设计自由度，从而实现了紧凑的设计。

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《Journal of Micromechanics and Microengineering》 |2006年第6期|共6页
作者
Brouwer DM; de Jong BR; Soemers HMJR; Van Dijk J;
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1. Sub-nanometer stable precision MEMS clamping mechanism maintaining clamp force unpowered for TEM application [J] . D. M. Brouwer. B. R. de Jong, H. M. J. R. Soemers, J. Van Dijk Journal of Micromechanics and Microengineering . 2006,第6期

机译：亚纳米级稳定精密MEMS夹紧机构，可保持TEM应用无动力的夹紧力
2. A CMOS-MEMS clamped-clamped beam displacement amplifier for resonant switch applications [J] . Liu Jia-Ren, Lu Shih-Chuan, Tsai Chun-Pu, Journal of Micromechanics and Microengineering . 2018,第6期

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3. Initially Clamped Piezoelectric Inchworm Linear Motor Design Based on Force Amplification Mechanisms for Miniaturized and Large Force Actuation Applications [J] . Hussam Kloub Proceedings . 2020,第1期

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4. ROTATIONAL PRECISION MEMS-BASED CLAMPING MECHANISM FOR STABLE FIXATION OF ELASTIC MECHANISMS [C] . Dannis M. Brouwer, B.R. de Jong, M. J. de Boer, Twenty-First Annual Meeting of the American Society for Precision Engineering . 2006

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5. Atomic force microscopy studies of eukaryotic clamp/clamp loader complex and mismatch repair initiation complex. [D] . Zhang, Na. 2009

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7. SUB-NANOMETER STABLE PRECISION MEMS CLAMPING MECHANISM MAINTAINING CLAMP FORCE UN-POWERED FOR TEM APPLICATION [O] . D. M. Brouwer, B. R. De Jong, H. M. J. R. Soemers, 2015

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8. Some Aspects of the Nonliner Vibrations of a Clamped-Clamped Aluminium Beam and Comparison with a Carbon Fiber Reinforced Plastic Beam [R] . Bennouna, M. M. K. 1980

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Sub-nanometer stable precision MEMS clamping mechanism maintaining clamp force unpowered for TEM application

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