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Highest-accuracy interferometer alignment by retroreflection scanning

机译:通过回射扫描实现最高精度的干涉仪对准

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摘要

One important prerequisite for interferometric length measurements of high accuracy is autocollimation adjustment. This guarantees that the direction of the length scale represented by light waves is parallel to the length direction of the object investigated. First we describe the conventional visual autocollimation adjustment method used at Physikalisch-Technische Bundesanstalt since the beginning of interferometric length measurements. Then a new autocollimation method based on scanning the retroreflection from the interferometer is described. Check measurements are performed in order to investigate the quality of the adjustment. As a result of the method applied the uncertainty contribution originating from the cosine error could be reduced drastically for the interferometer used.
机译:自动准直调整是高精度干涉式长度测量的重要先决条件。这保证了由光波表示的长度标尺的方向平行于所研究对象的长度方向。首先,我们介绍了自干涉式长度测量开始以来,Physikalisch-Technische Bundesanstalt使用的常规视觉自动准直调整方法。然后,描述了一种基于扫描干涉仪回射的新的自动准直方法。执行检查测量以调查调整的质量。由于采用了该方法,因此对于所使用的干涉仪,可以大大降低源自余弦误差的不确定性影响。

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