Double-grating interferometer for measurement of cylinder diameters

Yande Xu; Osami Sasaki; Takamasa Suzuki

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Double-grating interferometer for measurement of cylinder diameters

机译：双光栅干涉仪，用于测量圆柱直径

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We describe a double-grating interferometer for the measurement of cylinder diameters. The unique characteristic of this interferometer is that one can freely change the period of the interference fringes by turning the grating, which permits the measurement range of the interferometer also to be changed freely according to the cylinder diameter to be measured. A clear image of the cylinder can be obtained because the aperture diaphragm blocks the beams diffracted from the edge of the cylinder. The outside and inside diameters of the M4×0.7 mm hand tap are measured with this double-grating interferometer.

机译：我们描述了一种用于测量圆柱直径的双光栅干涉仪。这种干涉仪的独特之处在于，可以通过转动光栅自由地改变干涉条纹的周期，这使得干涉仪的测量范围也可以根据要测量的圆柱直径自由地改变。由于孔径光阑阻挡了从圆柱体边缘衍射的光束，因此可以获得清晰的圆柱体图像。用这种双光栅干涉仪测量M4×0.7 mm手动丝锥的外径和内径。

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《Applied optics》 |2004年第3期|共5页
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Yande Xu; Osami Sasaki; Takamasa Suzuki;
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1. Double-grating interferometer for measurement of cylinder diameters [J] . Yande Xu, Osami Sasaki, Takamasa Suzuki Applied Optics . 2004,第3期

机译：双光栅干涉仪，用于测量圆柱直径
2. Least-squares calibration method for double-grating interferometers used in measurement of long-focal-length lenses [J] . He Yong, Chen Lei, Liu Yao, Applied optics . 2019,第23期

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3. Double-grating interferometer with a one-to-one correspondence with a Michelson interferometer [J] . Optics Letters . 2003,第19期

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4. Double-grating Lateral Shearing Interferometer for EUV Optics At-wavelength Measurement [C] . Zhiqiang Liu, Masashi Okada, Katsumi Sugisaki, Metrology, Inspection, and Process Control for Microlithography XIX pt.2 . 2005

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5. Measurement and analysis of turbulence response near the stagnation region of large diameter cylindrical leading edges with aftbody [D] . Chowdhury, Md. Nafiz H. K. 2012

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6. Implementation of a double-grating interferometer for phase-contrast computed tomography in a conventional system nanotom® m [O] . Anna Khimchenko, Georg Schulz, Peter Thalmann, 2018

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7. Measurements of the pressure distributions on two circular cylinders of diameter d, vertically immersed in a turbulent boundary layer, are performed for various cylinder spacings s and angles of attack φ. The characteristics of the drag and lift forces acting on the cylinder are classified into three regions : i.e., 1) 0°＜__〜φ＜__〜30°, 2) 30°＜__〜φ＜__〜120°and 3) 120°＜__〜φ＜__〜180°which are divided by the two zero-lift force lines. Moreover, it is found that the interference between two cylinders is almost negligible for s/d＞__〜4, except for the influence of the wake region of the upstream cylinder. [O] . 谷口清一, 坂本弘志, Seiichi TANIGUCHI, 1980

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8. NIST 60-Millimeter Diameter Cylindrical Cavity Resonator: Performance Evaluationfor Permittivity Measurements [R] . Vanzura, E. J., Geyer, R. G., Janezic, M. D. 1993

机译：NIsT 60毫米直径圆柱腔谐振器：介电常数测量的性能评估

Double-grating interferometer for measurement of cylinder diameters

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