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Effect of stress on performance of dense wavelength division multiplexing filters: thermal properties

机译:应力对密集波分复用滤波器性能的影响:热性能

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摘要

Thin-film filters used for dense wavelength division multiplexing (DWDM) applications are processed by a variety of deposition techniques, including ion-beam sputtering. Ion-beam sputtering produces high-quality coatings and provides flexibility of coating materials. However, DWDM filters consisting of oxide films that are reactively deposited by ion-beam sputtering, as in most sputter techniques, typically exhibit high levels of compressive stress. This affects the thermal characteristics of the filters. We have identified three thermal effects: center wavelength drift with temperature, center wavelength creep, and permanent center wavelength shift. The latter two are strongly dependent on the stress state of the filter. Models are presented that support the data that were taken.
机译:用于密集波分复用(DWDM)应用的薄膜滤光片可通过多种沉积技术进行处理,包括离子束溅射。离子束溅射可产生高质量的涂层,并提供涂层材料的柔韧性。但是,像大多数溅射技术一样,由通过离子束溅射反应性沉积的氧化膜组成的DWDM滤镜通常会表现出高水平的压应力。这会影响过滤器的热特性。我们已经确定了三种热效应:中心波长随温度的漂移,中心波长蠕变和永久性中心波长偏移。后两者在很大程度上取决于过滤器的应力状态。提出了支持所获取数据的模型。

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