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Efficient testing of segmented aspherical mirrors by use of a reference plate and computer-generated holograms. II. Case study, error analysis, and experimental validation

机译:通过使用参考板和计算机生成的全息图,可以有效地测试分段非球面镜。二。案例研究,错误分析和实验验证

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摘要

Segmented mirrors present unique challenges to fabrication and testing that are absent for monolithic optics. Since traditional asphere tests do not address segmented optics adequately, we validate a previously developed method to test large quantities of segments accurately, quickly, and economically. In this test, the aspheric shape of each segment is controlled to high accuracy by use of computer-generated holograms, and the radius of curvature is tightly controlled by use of the reference plate. In an adjoining paper [Appl Opt 43, 5303 (2004)] we developed the theory for this test, and now we present a complete system design and optimization for measuring the 1.4-m segments from a 30-m F/1 primary. A complete tolerance analysis predicts a test accuracy of 4.8-nm rms surface and excellent accuracy for controlling the geometry of the segment. In addition, a laboratory demonstration using 30-cm optics is presented that demonstrated 3.9-nm rms surface accuracy.
机译:分段镜给单片光学器件带来了独特的制造和测试挑战。由于传统的非球面测试无法充分满足分段光学器件的需求,因此我们验证了先前开发的方法,可以准确,快速且经济地测试大量分段。在该测试中,通过使用计算机生成的全息图将每个片段的非球面形状控制到高精度,并且通过使用参考板来严格控制曲率半径。在相邻的论文中[Appl Opt 43,5303(2004)],我们开发了该测试的理论,现在,我们提供了完整的系统设计和优化,可以测量30 m F / 1初级线圈中1.4 m的线段。完整的公差分析可预测4.8 nm rms表面的测试精度和控制段几何形状的出色精度。此外,还展示了使用30厘米光学器件的实验室演示,演示了3.9纳米rms的表面精度。

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