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Angular-interrogation attenuated total reflection metrology system for plasmonic sensors

机译:等离子体传感器的角询问衰减全反射计量系统

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摘要

We develop an angular-interrogation attenuated total reflection (ATR) metrology system for three different plasmonic sensors, namely, a conventional surface plasmon resonance (SPR) device, a coupled-waveguide SPR device, and a nanoparticle-enhanced SPR device. The proposed metrology system is capable of measuring the reflectivity spectra of the transverse magnetic mode and the transverse electric mode simultaneously. Through the optimal control of the fabrication process and use of sophisticated system instrumentation, the experimental results confirm that the developed ATR system is capable of measuring the resonant angle with an angular accuracy of 10~(-4) deg.
机译:我们为三种不同的等离激元传感器,即常规的表面等离振子共振(SPR)设备,耦合波导SPR设备和纳米粒子增强的SPR设备,开发了一种角度询问衰减全反射(ATR)计量系统。所提出的计量系统能够同时测量横向磁模和横向电模的反射光谱。通过对制造过程的最佳控制和使用精密的系统仪器,实验结果证实,开发的ATR系统能够以10〜(-4)度的角精度测量共振角。

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