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Statistical approach to choosing a strategy of monochromatic monitoring of optical coating production

机译:选择光学镀膜生产单色监控策略的统计方法

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摘要

We presents what we believe to be a new approach to choosing a sequence of monitoring wavelengths for monochromatic monitoring of optical coating production. The new approach is based on a preproduction estimation of expected levels of errors in thickness of layers of a deposited coating. It is demonstrated that the proposed monitoring strategy reduces the effect of accumulation of thickness errors. An advantage of the new monitoring strategy becomes especially noticeable when the number of monitored layers is equal to several dozens.
机译:我们提出了一种我们认为是选择用于单色监测光学镀膜生产的监测波长序列的新方法。新方法基于对沉积涂层层厚度的预期误差水平的预生产估计。结果表明,所提出的监测策略减少了厚度误差累积的影响。当被监视的层数等于几十时,新的监视策略的优势将变得尤为明显。

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