Preparation of high-performance optical coatings with fluoride nanoparticle films made from autoclaved sols

Tsuyoshi Murata; Hitoshi Ishizawa; Izumi Motoyama; Akira Tanaka

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Preparation of high-performance optical coatings with fluoride nanoparticle films made from autoclaved sols

机译：用高压灭菌溶胶制备的氟化物纳米颗粒薄膜制备高性能光学涂层

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An ultralow refractive index is very advantageous when one designs antireflective coatings. We successfully obtained high-quality MgF_(2) thin films with ultralow refractive indices from autoclaved sols prepared from magnesium acetate and hydrofluoric acid. The MgF_(2) films consist of nanosized particles, and they have high laser-exposure durability at 193 nm. The reflectance of the antireflective coating with five layers, of which the top layer is formed by our method, is lower than 0.6percent in the incident angle range of 0 deg-60 deg at 193 nm.

机译：当人们设计抗反射涂层时，超低折射率是非常有利的。我们成功地从醋酸镁和氢氟酸制备的高压灭菌溶胶中成功获得了具有超低折射率的MgF_（2）高质量薄膜。 MgF_（2）薄膜由纳米粒子组成，并且在193 nm处具有很高的激光曝光耐久性。在193 nm处0度至60度的入射角范围内，五层抗反射涂层的反射率低于0.6％，其中顶层是通过我们的方法形成的。

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《Applied optics》 |2006年第7期|共4页
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Tsuyoshi Murata; Hitoshi Ishizawa; Izumi Motoyama; Akira Tanaka;
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1. Preparation of high-performance optical coatings with fluoride nanoparticle films made from autoclaved sols [J] . Tsuyoshi Murata, Hitoshi Ishizawa, Izumi Motoyama, Applied Optics . 2006,第7期

机译：用高压灭菌溶胶制成的氟化物纳米颗粒薄膜制备高性能光学涂层
2. Sol-Gel Preparation of Ultralow Refractive Index Magnesium Fluoride Optical Films for Broadband Antireflective Coatings [J] . Fangting Chi, Lianghong Yan, Haibing Lv, Nanoscience and Nanotechnology Letters . 2012,第4期

机译：宽带抗反射膜用超低折射率氟化镁光学薄膜的溶胶凝胶制备
3. Titanium oxide thin film preparation with sol coatings of plate and spindle-shaped nanoparticles for control of optical transmittance [J] . Chun Ming WEN, Naofumi UEKAWA, Khakkhanang KHAMFOO, Journal of the Ceramic Society of Japan . 2016,第1期

机译：具有用于控制透光率的板状和纺锤状纳米颗粒溶胶涂层的二氧化钛薄膜制剂
4. Preparation of TiO_2 Thin Films Using Inorganic Peroxo Titanic Complex and Autoclaved Sols as Precursors [C] . Lei Ge, Mingxia Xu, Lei E, China International Conference on High-Performance Ceramics . 2005

机译：使用无机过生钛络合物和高压灭菌溶胶作为前体的制备TiO_2薄膜
5. The sol-gel preparation of magnesium oxide and nanocrystalline magnesium and barium fluoride ceramic thin films, and the crystal chemistry and thermal stability of sol-gel prepared fluoride-substituted talc. [D] . Rywak, Anthony Alexander. 1994

机译：溶胶-凝胶法制备氧化镁，纳米晶镁和氟化钡陶瓷薄膜，以及溶胶-凝胶法制备的氟化物取代的滑石的晶体化学性质和热稳定性。
6. Improved Optical and Electrochromic Properties of NiOx Films by Low-Temperature Spin-Coating Method Based on NiOx Nanoparticles [O] . Xiaohong Xie, Changkang Gao, Xiang Du, 2018

机译：基于NiOx纳米粒子的低温旋涂法改善NiOx薄膜的光学和电致变色性能
7. Thin films-preparation, structure and properties. Preparation of ZrO2 and ZrO2-SiO2 coating films by the sol-gel method. [O] . Noboru TOHGE, Atsunori MATSUDA, Tsutomu MINAMI 1987

机译：薄膜制备，结构和性质。用溶胶 - 凝胶法制备ZrO2和ZrO2-SiO2涂膜。

Preparation of high-performance optical coatings with fluoride nanoparticle films made from autoclaved sols

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