• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Applied optics >Calibration for cylindrical specimens in grazing-incidence interferometry via integration of difference measurements
【24h】

Calibration for cylindrical specimens in grazing-incidence interferometry via integration of difference measurements

机译：通过差值测量的积分对掠入射干涉法中的圆柱样本进行校准

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

Cylindrical specimens may be tested advantageously by using grazing-incidence interferometry. A multiple positions test in combination with rotational averaging has recently been used to separate the surface deviations of the specimen from the interferometric aberrations. To reduce the measuring time and to check whether the results are reliable, a second procedure is now investigated, which uses the principle of the multiple positions test to determine quantities proportional to the difference quotients of the surface deviations. After numerical integration, the results can be compared with those obtained previously by rotational averaging. The measurement principle is described, and calibration results are presented.
机译：可以通过使用掠入射干涉法有利地测试圆柱形样本。结合旋转平均的多位置测试最近已被用于从干涉像差中分离出样品的表面偏差。为了减少测量时间并检查结果是否可靠，现在研究第二种方法，该方法使用多位置测试的原理来确定与表面偏差的商不同的量。进行数值积分后，可以将结果与先前通过旋转平均获得的结果进行比较。描述了测量原理，并给出了校准结果。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号