Ion-assisted deposition of TiO_(2)/SiO_(2) multilayers for mass production

Bin Fan; Masahiro Suzuki; Ken Tang

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Ion-assisted deposition of TiO_(2)/SiO_(2) multilayers for mass production

机译：离子辅助沉积TiO_（2）/ SiO_（2）多层以进行批量生产

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The optical and microstructural properties of filters composed of TiO_(2) and SiO_(2) multilayers deposited by different ion-assisted-deposition (IAD) parameters were investigated. The proper IAD coating conditions for mass-produced, environmentally stable, low-scattering, and low-absorption TiO_(2)/SiO_(2) multilayers were obtained after comparison of these filters.

机译：研究了由不同离子辅助沉积（IAD）参数沉积的TiO_（2）和SiO_（2）多层膜组成的滤光片的光学和微观结构性质。在对这些滤光片进行比较之后，获得了适合批量生产，环境稳定，低散射和低吸收性的TiO_（2）/ SiO_（2）多层膜的适当IAD涂层条件。

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《Applied optics》 |2006年第7期|共4页
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Bin Fan; Masahiro Suzuki; Ken Tang;
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1. Ion-assisted deposition of TiO_(2)/SiO_(2) multilayers for mass production [J] . Bin Fan, Masahiro Suzuki, Ken Tang Applied Optics . 2006,第7期

机译：离子辅助沉积TiO_（2）/ SiO_（2）多层以进行批量生产
2. Infrared interference coating by use of Si_(3)N_(4) and SiO_(2) films with ion-assisted deposition [J] . Cheng-Chung Lee, Shih-Liang Ku Applied optics . 2010,第3期

机译：使用离子辅助沉积的Si_（3）N_（4）和SiO_（2）膜进行红外干涉涂层
3. Wavefront control of SiO_(2)-based ultraviolet narrow-bandpass filters prepared by plasma ion-assisted deposition [J] . Jue Wang, Robert L. Maier, Horst Schreiber Applied Optics . 2007,第2期

机译：等离子体辅助沉积制备的SiO_（2）基紫外窄带滤光片的波前控制
4. Ion-assisted magnetron sputter deposition of B_4C doped Ni/Ti multilayer mirrors [C] . Fredrik Eriksson, Naureen Ghafoor, Daniel Ostach, SPIE Optical Engineering + Applications Conference . 2018

机译：B_4C掺杂的Ni / Ti多层反射镜的离子辅助磁控溅射沉积
5. Characterization of conducting polymer films grown via surface polymerization by ion-assisted deposition. [D] . Tepavcevic, Sanja. 2006

机译：通过离子辅助沉积通过表面聚合生长的导电聚合物薄膜的表征。
6. Three-Dimensional Graphene Nano-Networks with High Quality and Mass Production Capability via Precursor-Assisted Chemical Vapor Deposition [O] . Jong-Chul Yoon, Jung-Soo Lee, Sun-I Kim, -1

机译：通过前体辅助化学气相沉积获得高质量和大规模生产能力的三维石墨烯纳米网络
7. Enhanced orbital magnetic moment of an highly ordered epitaxial FePt thin film grown from multilayers by ion-assisted sputtering deposition [O] . Chih-Hao Lee, Yu-Sheng Chen, Li-Jung Liu, 2009

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8. Blanket Design, Apparatus, and Fabrication Techniques for the Mass Production of Multilayer Insulation Blankets for the Superconducting Super Collider. [R] . Gonczy, J. D., Boroski, W. N., Niemann, R. C., 1989

机译：用于超导超级碰撞机的多层绝缘毯大规模生产的橡皮布设计，装置和制造技术。

Ion-assisted deposition of TiO_(2)/SiO_(2) multilayers for mass production

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