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Computer screen photoassisted off-null ellipsometry

机译:电脑屏幕光辅助偏光椭圆仪

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摘要

The ellipsometric measurement of thickness is demonstrated using a computer screen as a light source and a webcam as a detector, adding imaging off-null ellipsometry to the range of available computer screen photoassisted techniques. The results show good qualitative agreement with a simplified theoretical model and a thickness resolution in the nanometer range is achieved. The presented model can be used to optimize the setup for sensitivity. Since the computer screen serves as a homogeneous large area illumination source, which can be tuned to different intensities for different parts of the sample, a large sensitivity range can be obtained without sacrificing thickness resolution.
机译:使用计算机屏幕作为光源,使用网络摄像头作为检测器,证明了厚度的椭偏测量,并在可用的计算机屏幕光辅助技术范围内增加了非零椭偏成像。结果表明,在简化的理论模型的基础上具有良好的定性一致性,并且可以实现纳米范围内的厚度分辨率。提出的模型可用于优化灵敏度设置。由于计算机屏幕用作均匀的大面积照明源,可以针对样品的不同部分将其调整为不同的强度,因此可以在不牺牲厚度分辨率的情况下获得较大的灵敏度范围。

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