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首页> 外文期刊>Applied optics >Development of multilayer laminar-type diffraction gratings to achieve high diffraction efficiencies in the 1-8 keV energy region
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Development of multilayer laminar-type diffraction gratings to achieve high diffraction efficiencies in the 1-8 keV energy region

机译：开发多层层状衍射光栅以在1-8 keV能量范围内实现高衍射效率

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摘要

W/C and Co/SiO_(2) multilayer gratings have been fabricated by depositing a multilayer coating on the surface of laminar-type holographic master gratings. The diffraction efficiency was measured by reflectometers in the energy region of 0.6-8.0 keV at synchrotron radiation facilities as well as with an x-ray diffractometer at 8.05 keV. The Co/SiO_(2) and W/C multilayer gratings showed peak diffraction efficiencies of 0.47 and 0.38 at 6.0 and 8.0 keV, respectively. To our knowledge, the peak efficiency of the W/C multilayer grating is the highest measured with hard x rays. The diffraction efficiency of the Co/SiO_(2) multilayer gratings was higher than that of the W/C multilayer grating in the energy range of 2.5-6.0 keV. However, it decreased significantly in the energy above the K absorption edge of Co (7.71 keV). For the Co/SiO_(2) multilayer grating, the measured diffraction efficiencies agreed with the calculated curves assuming a rms roughness of approx1 nm.
机译：W / C和Co / SiO_（2）多层光栅是通过在层状全息原版光栅表面上沉积多层涂层而制成的。衍射效率是通过在同步加速器辐射设施处的能量范围在0.6-8.0 keV的反射仪以及在8.05 keV的X射线衍射仪测量的。 Co / SiO_（2）和W / C多层光栅分别在6.0和8.0 keV下显示出0.47和0.38的峰值衍射效率。据我们所知，W / C多层光栅的峰值效率是用硬X射线测得的最高效率。在2.5-6.0 keV的能量范围内，Co / SiO_（2）多层光栅的衍射效率高于W / C多层光栅。但是，在Co的K吸收边（7.71 keV）以上的能量中，它显着降低。对于Co / SiO_（2）多层光栅，假设均方根粗糙度约为1 nm，则测得的衍射效率与计算曲线一致。

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