The first realization of a reflective 50/50 beam splitter based on a dielectric diffraction grating suitablefor high-power laser interferometers is reported. The beam splitter is designed to operate at a wavelength of 1064 nm and in s polarization. To minimize the performance degradation of the device that is due to fabrication fluctuations, during the design process special attention was paid to achieve high fabrication tolerances especially of groove width and depth. Applying this beam splitter to high-power laser interferometers, such as future gravitational wave detectors, will avoid critical thermal lensing effects and allow for the free choice of substrate materials.
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