Optical constants of crystalline HfO_(2) for energy range 140-930 eV

Elena Filatova; Andrey Sokolov; Jean-Michel Andre; Franz Schaefers; Walter Braun

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Optical constants of crystalline HfO_(2) for energy range 140-930 eV

机译：能量范围140-930 eV的晶体HfO_（2）的光学常数

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We calculated the optical constants of the monoclinic phase of a HfO_(2) film from reflection spectra measured using synchrotron radiation in the spectral region from 143eV to 927eV, which includes the HfN_(4,5~(-)), HfN_(2,3~(-)), and OK absorption edges. The calculations were carried out using the Kramers-Kronig relations. It could be shown that the relation R(E) approx E~(-4) can be used for extrapolation of the experimental reflection spectrum of HfO_(2) (and probably of other heavy elements) for energies such that theta/(theta)_(c) > 3.7.

机译：我们使用同步加速器辐射在143eV至927eV的光谱区域中测量的反射光谱（包括HfN_（4,5〜（-）），HfN_（2）来计算HfO_（2）膜的单斜晶相的光学常数。 3〜（-）），并确定吸收边缘。使用Kramers-Kronig关系进行计算。可以证明，关系R（E）近似E〜（-4）可用于推断HfO_（2）（以及可能还有其他重元素）的实验反射光谱的能量，以使theta /（theta） _（c）> 3.7。

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《Applied optics》 |2010年第14期|共8页
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Elena Filatova; Andrey Sokolov; Jean-Michel Andre; Franz Schaefers; Walter Braun;
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1. Optical constants of crystalline HfO_(2) for energy range 140-930 eV [J] . Elena Filatova, Andrey Sokolov, Jean-Michel Andre, Applied optics . 2010,第14期

机译：能量范围140-930 eV的晶体HfO_（2）的光学常数
2. Optical constants of evaporation-deposited silicon monoxide films in the 7.1-800 eV photon energy range [J] . Monica Fernandez-Perea, Manuela Vidal-Dasilva, Juan I. Larruquert, Journal of Applied Physics . 2009,第11期

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Optical constants of crystalline HfO_(2) for energy range 140-930 eV

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