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首页> 外文期刊>Applied optics >Thermal expansion coefficients of obliquely deposited MgF_(2) thin films and their intrinsic stress
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Thermal expansion coefficients of obliquely deposited MgF_(2) thin films and their intrinsic stress

机译：倾斜沉积的MgF_（2）薄膜的热膨胀系数及其固有应力

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摘要

This study elucidates the effects of columnar angles and deposition angles on the thermal expansion coefficients and intrinsic stress behaviors of MgF_(2) films with columnar microstructures. The behaviors associated with temperature-dependent stresses in the MgF_(2) films are measured using a phase-shifting Twyman-Green interferometer with a heating stage and the application of a phase reduction algorithm. The thermal expansion coefficients of MgF_(2) films at various columnar angles were larger than those of glass substrates. The intrinsic stress in the MgF_(2) films with columnar microstructures was compressive, while the thermal stress was tensile. The thermal expansion coefficients of MgF_(2) films with columnar microstructures and their intrinsic stress evidently depended on the deposition angle and the columnar angle.
机译：这项研究阐明了柱状角和沉积角对具有柱状微结构的MgF_（2）薄膜的热膨胀系数和固有应力行为的影响。 MgF_（2）薄膜中与温度相关的应力相关的行为是使用带加热台的相移Twyman-Green干涉仪和应用相变算法来测量的。 MgF_（2）薄膜在不同柱状角下的热膨胀系数均大于玻璃基板。具有柱状微结构的MgF_（2）薄膜中的固有应力为压缩应力，而热应力为拉伸应力。具有柱状微结构的MgF_（2）薄膜的热膨胀系数及其固有应力显然取决于沉积角和柱状角。

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