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Achromatic phase shifter with eight times magnification of rotation angle in low coherence interference microscopy

机译:低相干干涉显微镜中具有八倍旋转角的消色差移相器

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摘要

An achromatic phase shifter with a rotating half-wave plate (HWP) used at the input and output of the low coherence interference microscopy is presented. This novel achromatic phase-shifter configuration is first investigated, and then its performances are compared with those of traditional phase shifters theoretically by means of Jones matrices. It is evident that the achromatism and the variation of the amplitude ratio of the proposed achromatic phase-shifter configuration is much better than other traditional phase-shifter configurations, and it can provide a phase shift of eight times the rotation angle of the HWP, which is the largest magnification achieved by far. A low coherence interference microscopy system based on the proposed achromatic phase-shifter configuration is also established to confirm the eight times relation between phase-shift and rotation angle of the HWP experimentally. At last, the three-dimensional profile and the groove depth of a step height calibration standard are obtained by using the traditional four-step algorithm to illustrate the capability and the accuracy of the low coherence interference microscopy system based on the proposed achromatic phase-shifter configuration.
机译:提出了一种在低相干干涉显微镜的输入和输出处使用的带有旋转半波片(HWP)的消色差移相器。首先研究了这种新颖的消色差移相器配置,然后通过琼斯矩阵从理论上将其性能与传统移相器进行了比较。显然,所提出的消色差移相器配置的消色差和振幅比的变化要比其他传统移相器配置好得多,并且可以提供八倍于HWP旋转角的相移,这是迄今为止最大的放大倍率。还建立了一种基于所提出的消色差移相器结构的低相干干涉显微镜系统,以通过实验确定HWP的相移和旋转角之间的八倍关系。最后,利用传统的四步算法获得了台阶高度校准标准的三维轮廓和凹槽深度,以说明基于所提出的消色差移相器的低相干干涉显微镜系统的能力和精度。组态。

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