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Approaching ultimate resolution for soft x-ray spectrometers

机译:接近软X射线光谱仪的极限分辨率

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We explore the potential performance of soft x-ray spectrometers based on the use of varied-line-spacing spherical diffraction gratings (VLS-SG). The quantitative assessment is based on an optimization procedure to obtain both negligible optical aberrations at full illumination of the grating and a quasi linear focal curve. It involves high-order optical aberration cancellation to calculate the focal curves. We also examine the validity of small divergence closed-form formulas describing the light path function. Optimizing the optical and geometric parameters gives an ultimate resolving power, at 930 eV, of between 10 800 for a 3 m long instrument and 34 000 for an 11 m spectrometer according to the Rayleigh criterion. Typical fabrication tolerances would scale these values down by about 10percent. The findings are validated by ray-tracing simulations.
机译:我们基于变线间隔球面衍射光栅(VLS-SG)的使用,探索了软X射线光谱仪的潜在性能。定量评估基于优化程序,以获得在光栅完全照明时可忽略的光学像差和准线性聚焦曲线。它涉及高阶光学像差对消,以计算聚焦曲线。我们还研究了描述光路函数的小散度封闭形式公式的有效性。根据瑞利标准,优化光学和几何参数可在930 eV时获得3 m长仪器的最终分辨能力在10 800和11 m光谱仪的34000之间。典型的制造公差会将这些值缩小约10%。射线追踪模拟验证了这一发现。

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