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Measurement of LED chips using a large-area silicon photodiode

机译:使用大面积硅光电二极管测量LED芯片

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摘要

We propose the output power measurement of bare-wafer/chip light-emitting diodes (LEDs) using a large-area silicon (Si) photodiode with a simple structure and high accuracy relative to the conventional partial flux measurement using an integrating sphere. To obtain the optical characteristics of the LED chips measured using the two methods, three-dimensional ray-trace simulations are used to perform the measurement deviations owing to the chip position offset or tilt angle. The ray-tracing simulation results demonstrate that the deviation of light remaining in the integrating sphere is approximately 65% for the vertical LED chip and 53% for the flip-chip LED chip if the measurement distance in partial flux method is set to be 5-40 mm. By contrast, the deviation of light hitting the photodiode is only 15% for the vertical LED chip and 23% for the flip-chip LED chip if the large-area Si photodiode is used to measure the output power with the same measurement distance. As a result, the large-area Si photodiode method practically reduces the output power measurement deviations of the bare-wafer/chip LED, so that a high-accuracy measurement can be achieved in the mass production of the bare-wafer/chip LED without the complicated integrating sphere structure.
机译:我们建议使用大面积硅(Si)光电二极管对裸片/芯片发光二极管(LED)进行输出功率测量,该结构相对于使用积分球的常规部分通量测量而言具有简单的结构和高精度。为了获得使用这两种方法测量的LED芯片的光学特性,使用了三维射线轨迹模拟来执行由于芯片位置偏移或倾斜角而引起的测量偏差。光线跟踪仿真结果表明,如果将部分光通量方法中的测量距离设置为5,则垂直LED芯片中残留在积分球中的光的偏差约为65%,而倒装芯片LED中残留的光偏差约为53%。 40毫米相比之下,如果使用大面积的Si光电二极管以相同的测量距离来测量输出功率,则垂直LED芯片击中光电二极管的光的偏差仅为15%,而倒装芯片LED的光偏差仅为23%。结果,大面积的Si光电二极管方法实际上减小了裸片/芯片LED的输出功率测量偏差,从而可以在不使用裸片/芯片LED的大规模生产中实现高精度的测量。复杂的积分球结构。

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