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Optical relative humidity sensor with high sensitivity based on a polyimide-coated symmetrical metal-cladding waveguide

机译:基于聚酰亚胺涂层的对称金属包层波导的高灵敏度光学相对湿度传感器

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摘要

An optical structure for relative humidity (RH) sensing based on a polyimide-coated symmetrical metal-cladding waveguide is proposed. The diffusion of water molecules into the polyimide film leads to a combined change of thickness and refractive index. Due to the high sensitivity of ultrahigh-order modes, the interaction between water molecules and polyimide will give rise to a dramatic variation in the reflected light intensity. Our optical RH sensor exhibits a good linearity and a high RH resolution of approximately 0.16% for RH values ranging from 36% to 76%. In addition, it provides a short response time, a favorable stability over a long period, and a small degree of hysteresis. (C) 2015 Optical Society of America
机译:提出了一种基于聚酰亚胺包覆的对称金属包层波导的相对湿度(RH)传感光学结构。水分子扩散到聚酰亚胺膜中导致厚度和折射率的组合变化。由于超高阶模态的高灵敏度,水分子与聚酰亚胺之间的相互作用将引起反射光强度的巨大变化。我们的光学RH传感器具有良好的线性度,对于RH值范围为36%至76%的RH分辨率约为0.16%。另外,它提供了短的响应时间,长期良好的稳定性以及小的滞后度。 (C)2015年美国眼镜学会

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