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Phase topography-based characterization of thermal effects on materials and joining techniques

机译:基于相形貌的材料和连接技术热效应表征

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There are growing demands to characterize the stability of assemblies of optical components for ultrahigh-precision instruments. In this paper we demonstrate how absolute length measurements by interferometry can be applied to measure the thermal and dimensional stability of connections. In order to enable investigation of common joining techniques, including wringing, screwing, and gluing, as well as specialized, inorganic joining techniques such as silicatic bonding, thin-film soldering, and solderjet bumping, representative connections were fabricated. By using gage blocks or prismatic bodies as joining parts, parallelism and flatness were provided which are needed for precision interferometric length measurements. The stability of connection elements used in ultrahigh-precision instruments was investigated longitudinally and laterally to the connection interface, and also mutual tilting of the parts was detected by analysis of the phase topographies. The measurements have an accuracy level of about 1 nm, and the traditional wringing method was also considered as a reference joining technique. The long-term behavior was studied within a period of about 1 year under constant temperature. Further, the thermal dilatation and the reaction of connections to thermal stress were measured. Results show that screwed connections do not exhibit a significant drift of length or orientation. They also did not show response to temperature variations of +/- 10 degrees C. This is different for adhesive connections, where dimensional changes of up to 100 nm were observed. The specimens produced by using thin-film soldering as well as silicatic bonding revealed stability of length better than 5 nm per year and angular stability within +/- 0.1 arcsec. Furthermore, these specimens were shown to be insensitive to a temporary temperature variation in a range from 10 degrees C to 40 degrees C. This situation is slightly different for the sample connections produced by solderjet bumping, which show a positive length change of similar to 25 nm and a tilt of +/- 1 arcsec. These observations can be explained by creeping of the relatively large solder bumps that bridge a gap of about 100 mu m between the connected mirror plates. The thermal expansion of the connections shows a strong correlation with the "layer thickness." (C) 2015 Optical Society of America
机译:越来越需要表征用于超高精度仪器的光学组件的稳定性。在本文中,我们演示了如何通过干涉测量法测量绝对长度,以测量连接的热稳定性和尺寸稳定性。为了能够研究常见的连接技术,包括拧紧,拧紧和胶合,以及专门的无机连接技术,例如硅酸盐粘结,薄膜焊接和锡焊喷射凸点,我们制作了代表性的连接。通过使用量块或棱柱体作为连接部件,提供了平行度和平面度,这是精密干涉长度测量所需的。在连接界面的纵向和横向上研究了超高精度仪器中使用的连接元件的稳定性,并且通过相形貌分析检测了零件的相互倾斜。测量的精度约为1 nm,传统的拧紧方法也被视为参考连接技术。在恒温下约1年内研究了长期行为。此外,测量了热膨胀和连接对热应力的反应。结果表明,螺纹连接不会出现明显的长度或方向偏移。它们也没有显示出对+/- 10摄氏度的温度变化的响应。这对于粘合剂连接是不同的,在粘合剂连接中观察到最大100 nm的尺寸变化。通过使用薄膜焊接以及硅酸键合生产的样品显示出每年的长度稳定性优于5 nm,角稳定性在+/- 0.1 arcsec之内。此外,这些样品还显示出对温度范围从10摄氏度到40摄氏度的暂时温度变化不敏感。这种情况对于锡焊喷射凸点产生的样品连接略有不同,其正长度变化约为25 nm和+/- 1 arcsec的倾斜度。这些观察结果可以通过较大的焊料凸点的蠕变来解释,这些焊料凸点弥合了连接的镜板之间大约100微米的间隙。连接的热膨胀与“层厚度”密切相关。 (C)2015年美国眼镜学会

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