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Zinc oxide films chemically grown onto rigid and flexible substrates for TFT applications

机译:化学生长在用于TFT应用的刚性和柔性基板上的氧化锌膜

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This contribution presents some preliminary results regarding the use of a chemical route for the growth of good quality ZnO thin films that can be used for the fabrication of thin film transistors (TFTs). The films were grown at rather low temperature (60 °C) on glass and PET substrates using non-aqueous (zinc acetate dihydrate in methanol) precursor solution and their surface morphology, crystalline structure, optical transmittance and electrical characteristics were studied. The study indicated that good quality films with desirable ZnO structure onto rigid and flexible substrates can be obtained, using a simple, cheap, low temperature chemical growth method.
机译:这一贡献提供了一些有关化学路线的使用的初步结果,该化学路线用于生长可用于制造薄膜晶体管(TFT)的高质量ZnO薄膜。使用非水(醋酸锌二水合物的甲醇溶液)前体溶液在较低的温度(60°C)下在玻璃和PET基板上生长膜,并研究了它们的表面形态,晶体结构,光学透射率和电特性。研究表明,使用简单,廉价,低温化学生长方法,可以在刚性和柔性基板上获得具有理想ZnO结构的高质量薄膜。

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