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首页> 外文期刊>Journal of Materials Science >Growth and characterization of diamond particles, diamond films, and CNT-diamond composite films deposited simultaneously by hot filament CVD
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Growth and characterization of diamond particles, diamond films, and CNT-diamond composite films deposited simultaneously by hot filament CVD

机译：通过热丝CVD同时沉积的金刚石颗粒，金刚石膜和CNT-金刚石复合膜的生长和表征

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It is important to understand the growth of CNT-diamond composite films in order to improve the inter-link between two carbon allotropes, and, in turn, their physical properties for field emission and other applications. Isolated diamond particles, continuous diamond thin films, and thin films of carbon nanotubes (CNTs) having non-uniformly distributed diamond particles (CNT-diamond composite films) were simultaneously grown on unseeded, seeded, and catalyst pre-treated substrates, respectively, using a large-area multi-wafer-scale hot filament chemical vapor deposition. Films were deposited for four different growth durations at a given deposition condition. The changes in surface morphology and growth behavior of diamond particles with growth duration were investigated ex situ using field emission scanning electron microscopy and 2D confocal Raman depth spectral imaging, respectively. A surface morphological transition from faceted microcrystalline nature to nanocrystalline nature was observed as a function of growth duration in the case of isolated diamond particles grown on both unseeded and catalyst pre-treated substrates. However, such a morphological transition was not observed on the simultaneously grown continuous diamond thin films on seeded substrates. 2D confocal Raman depth spectral imaging of diamond particles showed that the local growth of CNTs did not affect the growth behavior of neighboring diamond particles on catalyst pre-treated substrates. These observations emphasize the importance of surface chemical reactions at the growth site in deciding sp 2 or sp 3 carbon growth and the final grain size of the diamond films.
机译：重要的是要了解CNT-金刚石复合膜的生长，以改善两种碳同素异形体之间的相互联系，进而改善其场发射和其他应用的物理性能。使用以下方法分别在未播种，晶种和催化剂预处理的基材上同时生长隔离的金刚石颗粒，连续的金刚石薄膜和具有非均匀分布的金刚石颗粒的碳纳米管（CNT）薄膜（CNT-金刚石复合膜）。大面积多晶圆级热丝化学气相沉积。在给定的沉积条件下，将膜沉积四个不同的生长时间。使用场发射扫描电子显微镜和二维共聚焦拉曼深度光谱成像技术分别对金刚石颗粒的表面形态和生长行为随生长时间的变化进行了研究。在未播种和催化剂预处理的基材上均生长有分离的金刚石颗粒的情况下，观察到了从刻面微晶性质到纳米晶性质的表面形态转变，其是生长持续时间的函数。然而，在种子衬底上同时生长的连续金刚石薄膜上未观察到这种形态学转变。金刚石颗粒的二维共焦拉曼深度光谱成像显示，CNT的局部生长不影响催化剂预处理的基材上相邻金刚石颗粒的生长行为。这些观察结果强调了生长部位表面化学反应在决定sp 2或sp 3碳的生长以及金刚石膜的最终晶粒尺寸方面的重要性。

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