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首页> 外文期刊>Journal of Physics, D. Applied Physics: A Europhysics Journal >Mass spectrometric study of discharges produced by a large-area dual-frequency-dual-antenna inductively coupled plasma source
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Mass spectrometric study of discharges produced by a large-area dual-frequency-dual-antenna inductively coupled plasma source

机译：大面积双频双天线感应耦合等离子体源产生的放电的质谱研究

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An energy-resolved quadrupole mass spectrometer is used to investigate the time-averaged ion energy distribution (IED) of positive ionic species in an Ar/CF 4 (90%/10%) discharge produced by dual-frequency-dual-antenna, next-generation large-area inductively coupled plasma source. The operating pressure is 10mTorr. Two radio frequencies of 2MHz (low frequency) and 13.56MHz (high frequency) are used to initiate and sustain the discharge. The orifice of the mass spectrometer was 100μm in diameter and placed at 30mm below the ICP source and 20mm outside the discharge volume. It is observed that both of the frequencies have significant effect on IEDs of all prominent discharge species. The evolution of IEDs with power shows that the discharge undergoes a mode transition (E to H) as the applied power is increased. At a fixed value of P 13.56MHz (250 and 500W), the energy spread and the energy separation between two peaks of IEDs increase illustrating enhanced E-mode. Above P 13.56 MHz=500W, the IEDs show opposite trends, i.e. decreasing energy spread and energy separation between two peaks, showing the strengthening of H-mode. Increasing P 13.56MHz at a fixed value of P 2MHz has similar effects. A comparison of IEDs sampled at a fixed total power (P 13.56MHz+P 2MHz) demonstrates that an IED can be tailored by changing the power ratio (P 13.56MHz/P 2MHz).
机译：使用能量分辨四极质谱仪研究双频双天线产生的Ar / CF 4（90％/ 10％）放电中正离子物质的时均离子能量分布（IED），其次代大面积电感耦合等离子体源。工作压力为10mTorr。分别使用2MHz（低频）和13.56MHz（高频）的两个射频来启动和维持放电。质谱仪的孔口直径为100μm，放置在ICP源下方30mm处，而放电体积外部20mm处。可以观察到，两个频率都对所有重要放电物质的IED产生显着影响。 IED随功率的演变表明，随着施加功率的增加，放电会经历模式转变（从E到H）。在P 13.56MHz（250和500W）的固定值下，IED的两个峰值之间的能量分布和能量间隔增加，说明E模式增强。在P 13.56 MHz = 500W以上时，IED呈现相反的趋势，即能量散布减小和两个峰之间的能量分离减小，表明H模式增强。以固定的P 2MHz值增加P 13.56MHz具有类似的效果。比较以固定总功率（P 13.56MHz + P 2MHz）采样的IED，可以通过改变功率比（P 13.56MHz / P 2MHz）来定制IED。

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