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首页> 外文期刊>電子情報通信学会技術研究報告. 環境電磁工学. Electromagnetic Compatibility >A fundamental study on measurement for dielectric constant of materials by ellipsometry method in milimeter-wave band
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A fundamental study on measurement for dielectric constant of materials by ellipsometry method in milimeter-wave band

机译:毫米波频段椭圆形法测量材料介电常数测量的基本研究

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摘要

There is the ellipsometry method which is a method for measuring the refractive index and thickness of a thin film in the optical domain as one of the method of dielectric constant measurement by the free space method. The present method is carried out under the estimation of the dielectric constant by measuring the magnitude ratio and the phase difference of the reflection coefficient of TM and TE waves. We discuss the error and the accuracy in the measurement in order to build the measurement of the system of the dielectric constant by ellipsometry method in the millimeter-wave band.
机译:存在椭圆形方法,是用于测量光学畴中薄膜的折射率和厚度的方法作为通过自由空间方法的介电常数测量的方法之一。 通过测量TM和TE波的反射系数的幅度比和相位差,在介电常数的估计下进行本方法。 我们讨论了测量中的误差和准确性,以便通过毫米波频带中的椭圆形方法构建介电常数的测量。

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