Surface deformation by coating stress is compensated by prefiguring the substrate with a radially nonuniformlayer of dense silica. Stresses in the compensation layer and reflector are modeled using finite element analysis to determine the optimal thickness profile, with the deposited coating reducing the surface deformation by 90%. This process is intended to allow implementation of both the compensation layer and the traditional multilayer coating in a single vacuum cycle. (C) 2019 Optical Society of America
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