Reference wave source based on silicon nitride waveguide in point diffraction interferometer

Chen Yuankai; Yang Yongying; Wang Chen; Li Yao; Bai Jian

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Reference wave source based on silicon nitride waveguide in point diffraction interferometer

机译：基于点衍射干涉仪的氮化硅波导的参考波源

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Reference wave source (RWS) is the key component of the point diffraction interferometer, which determines the quality of the reference wave. The silicon nitride waveguide RWS is proposed to efficiently overcome the drawbacks of the existing RWSs, aimed at providing a spherical reference wave with high numerical aperture (NA) and high accuracy. The waveguide RWS consists of the straight waveguide, the bend waveguide, and the Y-branch edge coupler. The straight waveguide determines the accuracy and the NA of the reference wave, whereas the latter two determine the light transmittance of the RWS. Simulation results show that the peak-to-valley (PV) and the rms of the deviation from an ideal spherical wave are 2.86 x 10(4) lambda (lambda = 532 nm) and 4.83 x 10(5) lambda, respectively, and the maximum light transmittance could reach 24%. Experiment results show that the NA of the reference wave reaches up to 0.58, its spot has a good circular symmetry, and its intensity has Gaussian distribution. Although the light transmittance is only 0.2%, it is expected to improve with the development of experimental conditions and waveguide fabrication technology. (C) 2020 Optical Society of America

机译：参考波源（RW）是点衍射干涉仪的关键分量，其确定参考波的质量。提出硅氮化硅波导RW以有效地克服现有RWS的缺点，旨在提供具有高数值孔径（NA）和高精度的球面参考波。波导RW由直波导，弯曲波导和Y分支边缘耦合器组成。直波导确定参考波的准确性和NA，而后两者确定RWS的透光率。仿真结果表明，峰谷谷（PV）和偏差的偏差偏差为2.86×10（4）λ（Lambda = 532nm），分别为4.83×10（5）λ和4.83×10（5）λ和最大透光率可达到24％。实验结果表明，参考波的NA达到高达0.58，其点具有良好的圆形对称性，其强度具有高斯分布。尽管透光率仅为0.2％，但预计随着实验条件和波导制造技术的发展。（c）2020美国光学学会

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来源
《Applied optics》 |2020年第5期|共10页
作者
Chen Yuankai; Yang Yongying; Wang Chen; Li Yao; Bai Jian;
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Zhejiang Univ Coll Opt Sci &

Engn State Key Lab Modern Opt Instrumentat 38 Zheda Rd Hangzhou 312207 Peoples R China;

Zhejiang Univ Coll Opt Sci &

Engn State Key Lab Modern Opt Instrumentat 38 Zheda Rd Hangzhou 312207 Peoples R China;

Zhejiang Univ Coll Opt Sci &

Engn State Key Lab Modern Opt Instrumentat 38 Zheda Rd Hangzhou 312207 Peoples R China;

Zhejiang Univ Coll Opt Sci &

Engn State Key Lab Modern Opt Instrumentat 38 Zheda Rd Hangzhou 312207 Peoples R China;

Zhejiang Univ Coll Opt Sci &

Engn State Key Lab Modern Opt Instrumentat 38 Zheda Rd Hangzhou 312207 Peoples R China;

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Reference wave source based on silicon nitride waveguide in point diffraction interferometer

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