Pyramidal structures, including upright pyramids and inverted pyramids (IPs), are commonly used as light-trapping structures for silicon solar cells and silicon photodetectors. In this paper, the possible ray propagation paths in a pyramidal structure are analyzed by establishing a mathematical model in which up to seven ray paths may exist either in a regular or random pyramidal structure. To reduce the reflectivity, the proportion of the quadruple bounce should be increased because of its lower reflectivity. Therefore, a chain IP structure with a quadruple bounce proportion of 10.33% is proposed, of which the overlap value Delta x/w is 0.4. According to theoretical ray-tracing calculations, the weighted average reflectivity is reduced by 0.75% compared to that of a random IP structure. Experimentally, chain IP structures are fabricated from the surface line damage produced by the diamond wire sawing of a silicon wafer as a mask, and the reflectivity of the structures is 0.80% lower than that of a random IP structure. The theoretical analysis and experimental results both show that the chain IP structure has better optical properties than the random IP structure, indicating promising prospects for the abovementioned applications. (C) 2020 Optical Society of America
展开▼
机译：金字塔结构，包括直立金字塔和倒金字塔（IPS），通常用作硅太阳能电池和硅光电探测器的光捕获结构。在本文中，通过建立一个数学模型来分析金字塔形结构中的可能的射线传播路径，其中最多可以存在于常规或随机的金字塔结构中的七射线路径。为了减少反射率，由于其反射率较低，应增加四重反射的比例。因此，提出了具有四重反弹比例的链IP结构，其中重叠值Delta X / W为0.4。根据理论射线跟踪计算，与随机IP结构相比，加权平均反射率减小了0.75％。通过实验，由硅晶片作为掩模的金刚晶锯制造的链IP结构制造，并且结构的反射率低于随机IP结构的0.80％。理论分析和实验结果表明，链IP结构具有比随机IP结构更好的光学性质，表明上述应用的前景前景。 （c）2020美国光学学会
展开▼
