In this paper, an optical vibrometer/accelerometer is designed using micro-optical dielectric sensors based on whispering gallery modes (WGM) phenomena. The proposed design is created as a sphere made from polydimethylsiloxane (PDMS). The dielectric sensor would be laid between a piezo stack and a proof mass of 10(-4) kg (implemented as body force to the sensor) in the vertical position. Once the piezo stack starts to impose a vibration in the vertical direction, the proof mass starts to vibrate, leading to a change in the morphology of the sensor. In turn, the WGM shifts would be seen on the transmission spectrum and would be related to the vibration/acceleration of the piezo stack. An analysis based on the force transmissibility from the piezo stack to the optical sensor and calibrations are carried out along with preliminary designs and experiments. Results showed that the proposed sensor could reach a very high resolution up to 8 nano-g with sensitivity d lambda/da approximate to 2.33 pm/mu g. (C) 2019 Optical Society of America
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机译：本文采用光学振动计/加速度计使用基于耳语廊道模式（WGM）现象的微光学介电传感器设计。所提出的设计是由来自聚二甲基硅氧烷（PDMS）制成的球体。在垂直位置，电介质传感器将在压电堆叠和5（-4）kg（作为体力上实现为传感器）的验证质量之间。一旦压电堆就开始在垂直方向上施加振动，就会开始振动，导致传感器的形态变化。反过来，在传输频谱上看到WGM偏移，并且与压电堆叠的振动/加速度相关。基于从压电堆叠到光学传感器和校准的力传递性的分析以及初步设计和实验。结果表明，所提出的传感器可以达到高达8纳米G的非常高的分辨率，灵敏度Dλ/ da近似为2.33μm/ mu g。 （c）2019年光学学会
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