Design of a subwavelength all-metal grating for generating azimuthally polarized beams based on modified particle swarm optimization

Zhu Chunlin; Jiao Qingbin; Tan Xin; Wang Wei; Bayanheshig

首页> 外文期刊>Applied optics >Design of a subwavelength all-metal grating for generating azimuthally polarized beams based on modified particle swarm optimization

【24h】

Design of a subwavelength all-metal grating for generating azimuthally polarized beams based on modified particle swarm optimization

机译：基于修改的粒子群优化的子波长全金属光栅的设计

获取原文

获取原文并翻译 | 示例

掌桥外文数据库（机构版） >>

开具论文收录证明 >>

文献代查 >>

页面导航

摘要
著录项
相关主题

摘要

A subwavelength metal grating for generating azimuthally polarized beams was designed. The grating material was determined by calculating the total thermal conductivity coefficient. A modified particle swarm optimization (PSO), which has a two-step algorithm structure, and a particle position-determined inertia weight was performed to establish the grating's structural parameters. Results show that an Au-Ti-Cu all-metal structure provides good thermal conductivity. A high duty cycle structure gives the grating high polarization selectivity of approximately 82.63% at 10.6 mu m and a minimum of 26.39% in the 9.6-11.6 mu m band. The modified PSO is more efficient and requires fewer calculations while maintaining accuracy. The geometrical parameter tolerances were also analyzed. The groove depth fabrication tolerance is 200 nm, and the sidewall angle fabrication tolerance is 19 degrees, which means that the optimized structure is insensitive to structural parameter deviations. (C) 2019 Optical Society of America

机译：设计了用于产生方位角偏振梁的亚波长金属光栅。通过计算总导热系数来确定光栅材料。进行修改的粒子群优化（PSO），其具有两步算法结构，以及粒子定位确定的惯性重量以建立光栅的结构参数。结果表明，Au-Ti-Cu全金属结构提供了良好的导热性。高占空比结构使得光栅高偏振选择性约为82.63％，在9.6-11.6 mu m频段中最少26.39％。改进的PSO更有效，并且需要更少的计算，同时保持准确性。还分析了几何参数公差。凹槽深度制造公差是200nm，侧壁角度制造公差是19度，这意味着优化的结构对结构参数偏差不敏感。（c）2019年光学学会

著录项

来源
《Applied optics》 |2019年第15期|共7页
作者
Zhu Chunlin; Jiao Qingbin; Tan Xin; Wang Wei; Bayanheshig;
展开▼
作者单位

Chinese Acad Sci Natl Engn Res Ctr Diffract Gratings Mfg &

Applica Changchun Inst Opt Fine Mech &

Phys Changchun 130033 Jilin Peoples R China;

Chinese Acad Sci Natl Engn Res Ctr Diffract Gratings Mfg &

Applica Changchun Inst Opt Fine Mech &

Phys Changchun 130033 Jilin Peoples R China;

Chinese Acad Sci Natl Engn Res Ctr Diffract Gratings Mfg &

Applica Changchun Inst Opt Fine Mech &

Phys Changchun 130033 Jilin Peoples R China;

Chinese Acad Sci Natl Engn Res Ctr Diffract Gratings Mfg &

Applica Changchun Inst Opt Fine Mech &

Phys Changchun 130033 Jilin Peoples R China;

Chinese Acad Sci Natl Engn Res Ctr Diffract Gratings Mfg &

Applica Changchun Inst Opt Fine Mech &

Phys Changchun 130033 Jilin Peoples R China;

展开▼
收录信息
原文格式 PDF
正文语种 eng
中图分类应用;
关键词

Design of a subwavelength all-metal grating for generating azimuthally polarized beams based on modified particle swarm optimization

摘要

著录项

相关主题

期刊订阅