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Random phase shifting shadow moire using a one-dimensional minimizer

机译:使用一维最小化器随机相移暗影莫尔

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摘要

The introduction of a random phase-shifting technique into a shadow moire system, where an equal and known (or unknown) phase step is used to demodulate the phase of interest, is beneficial for the improvement of measurement accuracy. However, in spite of recent advances in optical metrology phase-shifting techniques, simultaneously estimating unequal and unknown phase shifts from three random phase-shifting fringe patterns remains a significant challenge. This paper presents a one-dimensional minimizer-based technique to address this ill-posed problem of phase demodulation from random phase-shifting patterns. In this method, two new sets of connected fringe patterns, without background illumination, are constructed through normalizing the secondary fringe patterns. Then, a generalized phase-shifting algorithm is developed by utilizing the character of the modulation factor's standard deviation distribution. Both numerical simulations and optical experiments are performed to demonstrate the high accuracy and robustness of the proposed method. (C) 2019 Optical Society of America
机译:将随机相移技术引入阴影莫尔系统中,其中使用相等和已知的(或未知)相位步骤来解调感兴趣的相位,是有利于提高测量精度的影响。然而,尽管近期光学计量相移技术的进步,但同时估计来自三个随机相移边缘图案的不等和未知的相移仍然是一个重大挑战。本文介绍了一种基于一维最小化的技术,以解决从随机相移模式的相位解调的这种不良问题。在该方法中,通过归一化次级条纹图案来构造两个新的连接条纹图案,而无需背景照明。然后,通过利用调制因子的标准偏差分布的特征来开发广泛的相移算法。进行数值模拟和光学实验,以证明所提出的方法的高精度和鲁棒性。 (c)2019年光学学会

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  • 来源
    《Applied optics》 |2019年第36期|共9页
  • 作者单位

    Xian Technol Univ Sch Mechatron Engn Xian 710032 Shaanxi Peoples R China;

    Xian Technol Univ Sch Mechatron Engn Xian 710032 Shaanxi Peoples R China;

    Xian Technol Univ Sch Mechatron Engn Xian 710032 Shaanxi Peoples R China;

    Xian Technol Univ Sch Mechatron Engn Xian 710032 Shaanxi Peoples R China;

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  • 正文语种 eng
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