Performance of zoom homogenizer to control the size of illumination field

Kim Taeshin; Hwang Seungjin; Park Daewoong; Yu Tae Jun

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Performance of zoom homogenizer to control the size of illumination field

机译：变焦均化器控制照明场大小的性能

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We performed an illumination simulation, wave-optical simulation, and experiment on a zoom homogenizer and conventional beam homogenizer. The wave-optical simulation was performed for each lenslet using the shifted angular spectrum method for effective memory use. In the experiment, the parameters of the zoom homogenizer and beam homogenizer at all zoom positions were set using a system matrix. The uniformity and peak effect of the beam homogenizer were 16.57% and 16.63%, respectively, but those of the zoom homogenizer were 7.15% and 1.46%, respectively. The illumination field generated by the zoom homogenizer had a higher uniformity and lower peak effect at all zoom positions than the conventional one. (C) 2019 Optical Society of America

机译：我们在变焦均化器和传统光束均化器上进行了照明模拟，波光学模拟和实验。使用移位的角谱法对每个透镜执行波光学模拟，以便有效存储器使用。在实验中，使用系统矩阵设定所有变焦位置处的变焦均化器和光束均化器的参数。梁均化器的均匀性和峰值效应分别为16.57％和16.63％，但变焦均化器的均为7.15％和1.46％。由变焦均化器产生的照明场具有比传统的均匀位置更高的均匀性和更低的峰值效果。（c）2019年光学学会

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《Applied optics》 |2019年第9期|共9页
作者
Kim Taeshin; Hwang Seungjin; Park Daewoong; Yu Tae Jun;
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Handong Global Univ Dept Adv Green Energy &

Environm Pohang 37554 South Korea;

Handong Global Univ Dept Adv Green Energy &

Environm Pohang 37554 South Korea;

Handong Global Univ Dept Adv Green Energy &

Environm Pohang 37554 South Korea;

Handong Global Univ Dept Adv Green Energy &

Environm Pohang 37554 South Korea;

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Performance of zoom homogenizer to control the size of illumination field

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